Used AMAT / APPLIED MATERIALS DPS #293747937 for sale

AMAT / APPLIED MATERIALS DPS is an etcher/asher designed for both batch and single wafer processing. This equipment offers superior accuracy, repeatability and precision in etching and ashing processes. It features a powerful slit valve design which minimizes contact with the wafer and enables a precise volumetric recipe execution. The system consists of a 1050mm x 530mm processing chamber, which is suited for a variety of substrates and large wafer sizes for large scale production. With its EasyLift™ wafer transfer unit, users can transfer wafer to and from AMAT DPS without difficulty. Its fully automated recipe-driven design helps make operation extremely simple. The machine allows the users to create repeatable recipes for different etching/ashing processes, such as anisotropic, isotropic and downstream etching. It enables smooth control of both temperature and gas-flow, and automatically switches between etching and ashing processes. This allows for robust etching and ashing of substrates with minimal input from the user. The chamber is equipped with a low-pressure design which ensures a uniform and controlled atmosphere to further optimize throughput. APPLIED MATERIALS DPS also supports a wide variety of process chemistries and gases, such as CF4, SF6, O2, N2, Ar, and CHF3. In addition to providing reliable etching and ashing, DPS is designed for maximum process flexibility. It allows users to program their own recipes and optimize the tool settings to their application. With this flexibility, users can execute sensitive deep anisotropic etching with great precision. To ensure repeatable etching and ashing processes, the asset has a gas management model which monitors the gas purity and composition which can be monitored and stored. The equipment also has built-in safeguards to ensure safety at all times. AMAT / APPLIED MATERIALS DPS has been designed with a focus on operational simplicity and efficiency. It offers superior accuracy, repeatability and reliability, making it ideal for wafer etching and ashing. This system is a great choice for industry professionals and students alike who are looking for an easy to use, reliable, and efficient etching and ashing unit.