Used AMAT / APPLIED MATERIALS DPS #293747938 for sale

AMAT / APPLIED MATERIALS DPS is a parallel-plate etch/ashers designed to deposit, etch, strip, and/or anneal a variety of materials. The etch/ashers are programmed with recipes to enable reproducible results from batch-to-batch etch process runs. AMAT DPS systems offer advanced process technology incorporating automated process control, recipe automation, diagnostics, state-of-the-art process hardware, and an easy to use operator friendly interface. APPLIED MATERIALS DPS equipment offers a wide range of configuration options and features such as optional high frequency bias, automated sample loading, atmospheric plasma cleaning, and exhaust filters. DPS systems are designed for uniformity, repeatability, and high production throughput. Featuring quick cycle times, AMAT / APPLIED MATERIALS DPS ensures precise repeatable process control and repeatable results from batch to batch. The digital process control system further ensures precise control over the etch process conditions resulting in uniform etch or deposition results. AMAT DPS systems feature superior wafer handling technology for sample placement and movement. The high precision wafer alignment technology utilizes an automated top and bottom wafer holder for precise sample placement and movement with negligible wafer bowing. The sample manipulation unit also features precise wafer rotation and lift-off control. APPLIED MATERIALS DPS systems also feature integrated equipment control, recipe scripting, and performance monitoring. The more advanced DPS systems feature camera-based automated sample position determination and automated post-etch cleaning to further ensure reproducible etch results. The integrated diagnostic machine enables immediate identification of any potential process problems. AMAT / APPLIED MATERIALS DPS systems also feature cleanliness and safety features including particle trapping HEPA-filtered exhaust tool and an automated gaseous effluent management asset. AMAT DPS systems also feature an optional in-process OES monitoring model for real-time monitoring of etch process results. APPLIED MATERIALS DPS systems range from cost effective to sophisticated models and are capable of etching a wide range of materials including silicon, quartz, silicon dioxide, polysilicon, gallium arsenide, aluminum, and more.