Used AMAT / APPLIED MATERIALS DPS #9204533 for sale

AMAT / APPLIED MATERIALS DPS (Deep Plasma Strip) is an etcher / asher used primarily in semiconductor fabrication processes. It is capable of performing multiple removal operations simultaneously, such as etching, plasma cleaning, micro stripping, and wafer stripping, while maintaining a uniform etch rate across a variety of substrates. The equipment's unique hardware architecture includes separation and control chambers, allowing it to cycle rapidly between the three etch stages with an adjustable dwell time. This allows the chamber to switch between etch modes, while maintaining process accuracy and repeatability. AMAT DPS is most commonly used for the removal of photoresist, polymer layers, and metal films ranging from thin to very thick layers. It is suitable for many of the processes in which rapid etching of defect-free surfaces is critical, such as the fabrication of MEMS devices, IGBTs, and SOI wafers. It is also suitable for other processes such as contact hole cleaning, via etch back, trench isolation, and gap filling. APPLIED MATERIALS DPS features a semiconductor grade vacuum system for process chamber bakeout, as well as low-pressure nitrogen and oxygen purge capabilities. This supports a 100% gas-supported environment at reduced pressure in the lower-pressure process chamber, allowing for controlled mixed-gas cleaning cycles with uniform etching results. It provides control over process chemistry, pressure, and temperature, with precise adjustment of parameters such as RF power, pressure, and flow rate. The unit includes several features to ensure optimal performance. One such feature is the fact that DPS provides pulsed power with a factory-set pulse rate and adjustable pulse width. The speed is adjustable in increments from 80 to 200 Hz. This provides repetitive processes with high accuracy that reduces risk of damage to the substrate. Additionally, AMAT / APPLIED MATERIALS DPS has an easy-to-access chamber design that allows for rapid cleaning and maintenance. This reduces downtime and prevents contamination by eliminating the need to open the chamber and clean the wafer. Overall, AMAT DPS is an exceptionally versatile and reliable etcher / asher that provides highly consistent results for a range of processes in semiconductor fabrication. It is an intuitive machine and offers users complete control over the processing parameters, allowing them to adapt the process to different substrates and layers.