Used AMAT / APPLIED MATERIALS DPS #9204820 for sale
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ID: 9204820
Parts for chamber kits:
P/N Description
0040-81156 Upper chamber liner
0040-81155 Lower chamber liner
0021-26273 Cathode liner
0200-05465 Nozzle insert Al2O3
0200-04137 Lid Al2O3
0021-26274 RF Screen
0020-63668 Slit door.
AMAT / APPLIED MATERIALS DPS (Deep Silicon Etcher/Asher) is a critical tool for the semiconductor fabrication process used to create high-performance devices. It is a high-throughput, multi-chamber processing equipment that can reliably deliver the necessary development and fabrication techniques to cut precise patterns into a silicon wafer. AMAT DPS system consists of two main chambers separated by a wall, a load lock and an exhaust chamber. The first chamber houses the process modules and contains two etch plates, where the wafers are placed for processing. This chamber is filled with a gas that is typically a mixture of chlorine and fluorine-containing compounds. The second chamber contains a piston and a linear motion stage to provide the necessary force for etching and ashing. The load lock is used to move the wafers between the two chambers without allowing the ambient environment to mix with the gases inside the chambers. APPLIED MATERIALS DPS platform features two primary processes, etching and ashing. Etching is used to create shallow pockets in the silicon wafer with an angled profile, while ashing is used to remove any material left over from the etching process. DPS tool provides high-precision etching and ashing capabilities with repeatable processes and precise uniformity across the wafer. To achieve this, the unit utilizes highly specialized optics and a beam-steering mechanism to ensure that the appropriate amount of time, energy, and depth are applied to each wafer. The applications of AMAT / APPLIED MATERIALS DPS machine are diverse and encompass a wide range of sectors. It is used in a variety of technologies such as high-speed/high-yield semiconductor production, display device manufacturing, and thin film device fabrication. The tool is also used for advanced photomask production and MEMS (Microelectromechanical Systems) fabrication. In addition, it is used to manufacture components for electronic interconnects, high-density memories, and IC packages. With its advanced feature sets, precision, and flexibility, AMAT DPS platform is an important part in the continuing advancement of semiconductor fabrication and device manufacturing. The asset is designed to meet stringent industry standards and provides reliable operation, resulting in increased yields and performance.
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