Used AMAT / APPLIED MATERIALS DPS #9209124 for sale

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ID: 9209124
Wafer Size: 12"
Chambers, 12".
AMAT / APPLIED MATERIALS DPS etcher/asher is a type of vacuum-pressure etcher/asher used to create specialized components and semiconductor devices. It is a robust, reliable, and repeatable etching and ashing process and meets all stringent industry application requirements. AMAT DPS features a single cabinet design that houses a plasma source, reagent series, chamber components, process gasses, and control electronics/GUI software. APPLIED MATERIALS DPS can produce high quality, repeatable etch and ash results in a wide variety of industrial semiconductor materials including metals, oxide, nitride, and low-k dielectric films. The machine comes with a large chamber that allows for more uniform etching and ashing in all areas of the wafer without any "edge effects", that could lead to potential chip failure or yield loss. The automated cycle control with DPS maintains essential process parameters for consistent batch-to-batch uniformity, while the built-in diagnostics monitor system performance and report results in real time. The DP Etcher/Asher allows the user to automatically adjust the pressure and temperature of the chamber, allowing for a more precise etch/ash every time. In addition, the wide range of process windows available make it suitable for etching a wide range of materials and substrates. The etcher/asher comes with progressive source control capabilities. This allows the user to selectively blend the power of the plasma source, reagents, and gasses based on the application that is being processed. This ensures precise and efficient etching/ashing. The unit also comes with a direct feed gas distribution system, that delivers the process gasses to the plasma chamber in precisely the rightmix and amount. This is coupled with a cascaded gas composition control for fine-tuned process control. The machine is also very user-friendly and reliable, due to an intuitive HMI (Human-Machine Interface) that includes automation features and a graphical user interface database for easy process setup and adjusting. Furthermore, AMAT / APPLIED MATERIALS DPS includes built-in safety features to protect components from damage and unexpected etch/ash results. This includes interlock, pressure sensors, outlet gas flow detectors, and turn-off safety sensors. In conclusion, AMAT DPS Etcher/Asher is an efficient, reliable, and cost-effective etching/ashing system used to create high-quality, precision components and semiconductor devices. Its robust features, reliable control, and unique user interface allow for excellent repeatability and high throughput. The various safety features ensure the components are not damaged in the process.
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