Used AMAT / APPLIED MATERIALS DPS #9396746 for sale

ID: 9396746
Surface cleaning system.
AMAT / APPLIED MATERIALS DPS is an automated dry etcher/ asher designed for microelectronics production. It is capable of cleaning, planarizing, and etching small, complex components using plasma-based physical vapor deposition (PVD) techniques. AMAT DPS etcher is based on a rotating magnetron sputter source that is designed to etch tiny features in an ultra-short time using an extremely precise beam. It uses a patented ion beaming technology which produces a focused and controlled plasma flow to targets the tiny features or other areas of interest. APPLIED MATERIALS DPS etcher uses a passive magnetic cone that helps to monitor its position precisely and deliver a uniform ion beam for sputtering. It also uses an automated plasma-pressure equipment to monitor the plasma gases, vacuum level, and ionization of the plasma flow. The automated control system is capable of controlling the pressure, deposition rate, and plasma emitter parameters to achieve highly repeatable, uniform results with minimal manual intervention. Additionally, the etcher also comes equipped with a high-precision segmented temperature sensor to enable the repeatable alignment of components in its three-dimensional environment. This unit also features a multi-gaseous capability with chambers for gaseous precursor and post plasma, which is essential for the deposition of multiple layers. As an additional feature, it has a built-in thermal-relief machine that dissipates heat from the target parts, allowing the energy to be distributed more evenly, preventing any thermal shock that could occur from rapid thermal changes. DPS etcher is designed to be compatible with most deposition materials, ranging from graphene to aluminum. Its thermal stability ensures that it can handle extreme temperatures, making it suitable for advanced processes such as doping and metal deposition. Additionally, it has a tight safety mechanism that includes automatic shutoff in case of unsafe conditions. It also features an automatic contamination control tool to avoid cross-contamination between substrates. In conclusion, AMAT / APPLIED MATERIALS DPS provides a powerful and versatile dry etching and ashing tool for microelectronics production. Featuring an automated control asset which enables accurate, repeatable, and uniform deposition of materials, it is one of the more economical automated etcher delivering a reliable and cost-effective solution for high-volume production.
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