Used AMAT / APPLIED MATERIALS DPS #9401495 for sale

ID: 9401495
Wafer Size: 8"
Vintage: 1999
Poly etcher, 8" 1999 vintage.
AMAT AMAT / APPLIED MATERIALS DPS (Dry Processing Equipment) is an advanced etch and asher technology used for high-precision etching and ashing in the semiconductor and other industries. It is designed to support a variety of materials and processes, such as dry etch, asher interlayer, cleaning, surface and bulk treatment and reconditioning. The system is mainly composed of four parts: the Process Module, the Auxiliary Module, the Pedestal and the Chemical Distribution Unit. The Process Module is the main contributor to etching and ashing. It includes a horizontal vacuum chamber which is equipped with an ion implanter and a throttle valve through which gasses are supplied to the chamber. High frequency RF power is supplied to the ion implanter, resulting in a strong electric field inside the chamber. This creates a plasma within the chamber, enabling ions to be accelerated to a desired energy level, which then can be used to strip away materials. The Auxiliary Module contains the electromagnetic coils forming the magnetic field for the plasma, as well as a host of temperature, pressure, and other sensors in order to monitor and control the process. It also serves as the source of heated gasses, to provide smoother etching patterns. Further, it can include a batch quartz crystal monitor, which serves to monitor the progress of etching and ashing. The Pedestal is a chamber mounted on top of the vacuum chamber to provide the base for the wafers during the process. It is also used for specimen viewing and can be equipped with loadlock technology to allow wafers to be loaded and unloaded quickly and conveniently. The Chemical Distribution Machine is the last element of AMAT DPS, and consists of a series of computer-controlled pumps and valves used to supply the required chemicals to the chamber during the etching and ashing process. This ensures a stable and consistent process, as well as providing an opportunity for the user to make fine-tuned adjustments to the process parameters. APPLIED MATERIALS DPS is a powerful, efficient and versatile tool for etching and ashing of a variety of measuring substrates. Its components are designed for precision and reliability, affording the user the highest accuracy in their processes. Thanks to its sophisticated control systems and capacity for adaptation, DPS can provide precision-etched parts in just a few minutes, making it ideal for a range of applications, including semiconductor fabrication, materials research and components production.
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