Used AMAT / APPLIED MATERIALS E-max #9181384 for sale
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AMAT / APPLIED MATERIALS E-max is an advanced etcher/asher equipment designed to support advanced wafer patterning applications. AMAT E-max etcher/asher combines etching, ashplasma, and RIE (reactive ion dry etch) processes in a single system. This provides a dynamic architecture for wafer processing operations with high productivity, superior process repeatability, and minimal maintenance. The unit architecture consists of two parallel sub-systems, a production core and a test core. The production core provides the process atmosphere, loading/unloading, and process control while the test core is used for process development and for the verification of production batches. APPLIED MATERIALS E-max offers a number of advanced features to improve efficiency and increase yields. It supports high-efficiency ashplasma processes, with minimal sputtering damage and minimal ash deposits. Process uniformity is further enhanced by the use of advanced multi-zone processing and a multi-radiofrequency power supply. The machine is also equipped with a real-time diagnostics tool that provides in-situ diagnostic capability of the plasma environment, enabling process optimization and improvement. In addition to its advanced process capabilities, E-max features an advanced in-situ clean chamber technology that enables low-cost, high-efficiency particles-free cleaning. This can significantly reduce the cost of wafer processing since contaminants can be removed in situ, reducing the need for manual cleaning in separate processing steps. Finally, AMAT / APPLIED MATERIALS E-max offers full process automation and integration solutions for integration with various MES/SAP systems. This allows for real-time data acquisition and process control during wafer processing operations, enabling accuracy and process optimization. AMAT E-max offers a reliable and cost-effective solution for wafer processing operations. Its advanced etching, ashplasma, and RIE capabilities enable process repeatability and in-situ cleaning to reduce costs. The asset's real-time diagnostics and automation solutions enable accuracy and process optimization. All of these features combine to make APPLIED MATERIALS E-max a powerful and versatile etcher/asher for any advanced wafer processing application.
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