Used AMAT / APPLIED MATERIALS eMax CT+ #293587502 for sale

AMAT / APPLIED MATERIALS eMax CT+
ID: 293587502
Wafer Size: 12"
Vintage: 2005
Oxide etcher, 12" 2005 vintage.
AMAT / APPLIED MATERIALS eMax CT+ is an advanced etching- and ashing- system designed to make high-precision etching and ashing processes easier and more efficient. The machine is a tool that combines high-end etching and ashing systems, with advanced process and software control, into a single integrated platform. AMAT EMAX_CT+ machine is an all-in-one solution for precision etching and ashing. It provides a consistent etch depth and uniform etch micro-topography, with process control options for deposition and etching recipe parameters for resist stripping and etching of particles such as Si, GaAs, and CdS. The machine is equipped with an integrated reverse-pulse generator, enabling repeatable times and durations for ion beam etch processes. Sub-1µm accuracy and 0.05µm precision make this a solution ideal for applications ranging from simple geometrical etching tasks to advanced research projects requiring high levels of precision. The software-automated equipment is designed to reduce operating cost and improve overall process performance. Various features, software, and controls have been designed to make sure that the desired etch parameters and processes are maintained even with challenging and sensitive substrates. The user-friendly front panel provides easy access to recipes, parameters, operating conditions, alarms, and process statistics. The setup wizard and integrated diagnostics further simplify operation. APPLIED MATERIALS E-MAX CT+ has a closed chamber with advanced safety features that minimize exposure of personnel to particles and vapors. It is designed to meet stringent safety and operational requirements. In addition, the etch is carried out in accordance with edge isolation, voltage mode techniques, and software-stabilized parameters, ensuring optimized process results. Maintenance and servicing procedures are quick and easy, since user intervention is only required for the periodic replacement of the etch chamber's inner lining. E-MAX CT+ automates the assembly and testing of process chambers prior to each etching session, reducing system setup time while ensuring accuracy and reliability. In summary, AMAT / APPLIED MATERIALS E-MAX CT+ etching- and ashing- system is an ideal solution for etching and ashing processes demanding sub-1µm accuracy, repeatable results, and maximum process control. The integrated reverse pulse generator, process controls, and ease of setup and maintenance make this machine an indispensable tool for the advanced etcher.
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