Used AMAT / APPLIED MATERIALS eMax CT+ #293753868 for sale

AMAT / APPLIED MATERIALS eMax CT+ is an etcher/asher equipment that is designed for high reliability and process temperatures up to 512°C. It has integrated RF power, pressure, and temperature control for both etch and ash modes and high uniformity. The system is optimized for high etch rate and for minimizing damage to substrates. The unit is equipped with a high-precision moving chuck that provides precise positioning and scanning during etching or ashing. This helps to achieve superior process uniformity. It also features a RF generator that provides superior power delivery and stability. This helps to achieve high etch rate along with good selectivity for various materials etch applications. The machine is powered by the SABRE Controller. This high-performance controller is designed to provide accurate and reliable programming, accurate pressure and temperature control, and an easy to use Human Machine Interface (HMI). It also provides real-time statistical process monitoring, auto sample recognition, and recipe optimization capabilities. The tool also offers a wide range of features designed to optimize the etching and ashing process. It provides selectable etch profiles, such as constant rate etch, linear or programmable p-t profiles, and selectable mask modes. The asset also supports temperature sensing and etch rate control for optimal process stability. The advanced closed-loop temperature control model ensures highly uniform temperature across the substrate. In addition, the equipment offers sophisticated diagnostic features, such as process monitoring, chamber gas motion detection, and advanced substrate stress analysis. It also includes advanced safety interlocks that help ensure safe operation even in case of unexpected process excursions. Overall, AMAT EMAX_CT+ is an advanced etcher/asher system that offers outstanding process stability, uniformity, selectivity, and reliability. It is an excellent choice for etching and ashing a wide range of materials.