Used AMAT / APPLIED MATERIALS eMax CT+ #9235112 for sale

AMAT / APPLIED MATERIALS eMax CT+
ID: 9235112
Wafer Size: 12"
Vintage: 2006
System, 12" 2006 vintage.
AMAT / APPLIED MATERIALS eMax CT+ Etcher/Asher is an advanced etch and clean platform built to take on a wide variety of etching and cleaning requirements in the semiconductor industry. This equipment is equipped with the latest in plasma etching technology, providing an effective solution for high aspect ratio holes, shallow trenches, and sidewalls. The system is able to process a wide variety of chamber sizes and types, allowing etching of both large and small wafers. The unit utilizes a high frequency power supply with low stress technology to ensure high quality etch profiles. The fully loaded platform has the capacity to process up to six large wafers simultaneously with a single cathode machine. It has temperature control across the entire wafer basin, including adjustable temperature and RF distribution for better process control. AMAT EMAX_CT+ is equipped with an intuitive HMI that enables the operator to customize preprogrammed recipes and setting parameters of process gases and time, pressure, temperature, and other output parameters. APPLIED MATERIALS E-MAX CT+ tool is perfect for applications such as SiO2 etching for MEMS packaging, wafer dicing, and Passivation layers. It is also suitable for post etch residue removal processes, such as wet or dry cleaning. The asset is designed to be robust and more reliable than traditional systems, making it an ideal platform for production-grade cycling time. EMAX_CT+ model is powered by advanced safety, efficiency, and control features. It is equipped with automatic grain recognition, which reduces grain mark appearance. It has built-in gas alarm capabilities that detect and monitor abnormal gas use and reservoir pressure. A self-inspection feature allows for an automatic periodical self-test, allowing for better management of the equipment. The system is also equipped with a gas flow monitor and gas consumption monitoring, which reduces gas use. This coupled with easy maintenance and exchangeable parts reduces time and cost. E-MAX CT+ is an ideal solution for precision etching and cleaning applications. It provides exceptional etch profiles and process control for a wide range of wafers and applications. The robust design, intuitive HMI, advanced safety and control features, and exchangeable parts make APPLIED MATERIALS EMAX_CT+ an ideal etcher/asher for semiconductor production and research.
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