Used AMAT / APPLIED MATERIALS eMax CT+ #9314602 for sale

AMAT / APPLIED MATERIALS eMax CT+
ID: 9314602
Wafer Size: 12"
Vintage: 2004
System, 12" 2004 vintage.
AMAT / APPLIED MATERIALS eMax CT+ is an etcher/asher equipment used to modify the topography of a range of substrates to create a desired surface finish. The system is well-suited to the fabrication of semiconductor devices and is often used in back-end processing of integrated circuits. AMAT EMAX_CT+ can be used to etch or asher various layers in a substrate's topography, including aluminium, titanium, copper, and silicon. It can perform a variety of etching/ashing processes, such as dry or wet etch, wet strip, deep reactive ion etching (DRIE), and electrochemical etching (ECE). The unit also offers an additional etching/ashing tool that allows for precise control over process parameters, such as etch time and temperature. APPLIED MATERIALS E-MAX CT+ is equipped with a three-stage End Point Detection (EPD) machine. This tool monitors the resistivity and layer thickness of the substrate during etching/ashing. Thanks to the EPD asset, it is possible to accurately predict the end point of a process and thus ensure that the desired surface finish is achieved. Furthermore, the model allows for multiple etching/ashing runs on the same substrate without the need to re-set the EPD equipment's parameters. E-MAX CT+ is a large and reliable system that offers excellent performance and accurate results. It has the ability to precisely etch/ash wafers ranging in sizes up to 300mm, and can run etching/ashing processes in a controlled atmosphere. Moreover, the unit is equipped with a fully automated loading and unloading machine, as well as a range of process monitoring and control features, such as data logging, process mapping, and recipe management. Thanks to its advanced features, AMAT eMax CT+ is an ideal etch/asher tool for industries that require precision, speed, and accuracy in their processing of substrates. Furthermore, the tool is easy to use and maintain, and is backed by AMAT comprehensive technical support.
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