Used AMAT / APPLIED MATERIALS EMAX #9133082 for sale
URL successfully copied!
Tap to zoom
ID: 9133082
Dry Etchs, 8"
JMF
Application: oxide etch
Chamber Type/ Location
System Configuration BASE
Position A Oxide Main Etch
Position B Oxide Main Etch
Position C Oxide Main Etch
Position F ORIENTER
Position A Configuration Oxide Main Etch
Position B Configuration Oxide Main Etch
Position C Configuration Oxide Main Etch
System Safety Equipment
EMO Switch Type TURN TO RELEASE EMO ETI COMPLIANT
EMO Guard Ring INCLUDED
Smoke Detector At MF No Skin YES
Smoke Detector At Gen Rack YES
Smoke Detector At AC Rack YES
Water and Smoke Detector ALARM
System Labels ENGLISH
CHA - CHA - OXIDE
EMAX Process Kit USED
EMAX Oxide Turbo Pump Acatel 1600
Emission Endpoint Type Monocro
EMAX Oxide ESC USED Flat
EMAX Oxide BIAS RF GEN OEM-28B
EMAX Oxide Throttle Dual Butter fly
EMAX Oxide Gate Valve Pendlum
CHB - CHB - OXIDE
EMAX Process Kit USED
EMAX Oxide Turbo Pump Acatel 1600
Emission Endpoint Type Monocro
EMAX Oxide ESC USED Flat
EMAX Oxide BIAS RF GEN OEM-28B
EMAX Oxide Throttle Dual Butter fly
EMAX Oxide Gate Valve Pendlum
CHC - CHC - OXIDE
EMAX Process Kit USED
EMAX Oxide Turbo Pump Acatel 1600
Emission Endpoint Type Monocro
EMAX Oxide ESC USED Flat
EMAX Oxide BIAS RF GEN OEM-28B
EMAX Oxide Throttle Dual Butter fly
EMAX Oxide Gate Valve Pendlum
Gas Delivery Options
Pallet Options
Valve Fujikin
Regulator Fujikin
MFC Type AREA FC-780C
Gas Panel Pallet A Gas Panel Pallet A
Gas Line Requirement
Pallet Pallet
Gas Line Configuration
Pallet Corrosive Gas Line Qty 3
Pallet Inert Gas Line Qty 5
Filter Qty 8
Gas Panel Pallet B Gas Panel Pallet B
Gas Line Requirement
Pallet Pallet
Gas Line Configuration
Pallet Corrosive Gas Line Qty 3
Pallet Inert Gas Line Qty 5
Filter Qty 8
Gas Panel Pallet C Gas Panel Pallet C
Gas Line Requirement
Pallet Pallet
Gas Line Configuration
Pallet Corrosive Gas Line Qty 3
Pallet Inert Gas Line Qty 5
Filter Qty 8
Gas Panel Features Gas Panel Features
Gas Panel Features
Gas Panel Controller VME I
Mainframe
General Mainframe Options
Facilities Type REGULATED
Facilities Orientation MAINFRAME FACILITIES BACK CONNECTION
Loadlock/Cassette Options
Loadlock Type NBLL W/ AUTO-ROTATION
Loadlock Cover Finish ANTI-STATIC PAINTED
Loadlock Slit Valve Oring Type VITON
Wafer Mapping STD
Wafer Out of Cassette Sensor YES
Cassette Present Sensor YES
Transfer Chamber Options
Transfer Ch Manual Lid Hoist YES
Robot Type CENTURA HP+ ROBOT
Wafer On Blade Detector BASIC
Loadlock Vent BOTTOM VENT
Front Panel
Front Panel ANTI-STATIC PAINTED
Signal Light Tower 4 COLOR SIGNAL LIGHT TOWER INCLUDING RED LIGHT
4 Color Signal Light Tower Configuration
Top Light Color RED
Second Light Color YELLOW
Third Light Color GREEN
Fourth Light Color BLUE
Signal Light Tower Buzzer ENABLED
Second Signal Light Tower YES
Remote
System Controller
Controller Type 86 INCH COMMON CONTROLLER
Cntrlr Electrical Interface BOTTOM FEED
Controller Exhaust TOP EXHAUST
Controller Cover Option YES
System Monitors
System Monitor 2 TTW / different cable lengths
Monitor Cursor 2 BLINKING CURSOR
AC Rack
GFI 30mAMP
AC Rack Types 84 INCH SLIM AC GEN RACK
Exhaust Collar 84 INCH SLIM RACK EXHAUST COLLAR
Umbilical
Ctrlr to Mainframe Umbilical 25Ft
HX Control Cable Length 50Ft
Heat Exchanger Hose Length 65Ft
Pump Cable Length 65Ft
RF Generator Cable 65Ft
Pump Interface Only
Pump Interface Qty Interface Only
AMAT / APPLIED MATERIALS EMAX is an industry-leading etcher/asher designed for the deep-etch and shallow-etch permalloy deposition process. It is a robust and reliable equipment that offers superior accuracy and performance for the etch/ash process. With its high flexibility and precision control, AMAT EMAX is an ideal solution for deep-etch and shallow-etch permalloy deposition. APPLIED MATERIALS EMAX etch/ash system utilizes a dual-axis magnetic-field-controlled source to precisely control the application of the exposed process material. The source applies the process material to the substrate while the substrate is held firmly against EMAX source head, preventing slippage during the etching process. This ensures an accurate, uniform application of the process material. AMAT / APPLIED MATERIALS EMAX unit features built-in software that allows users to customize the process parameters to best fit the desired results. The software also provides real-time data and feedback on the status of the etch/ash process, which helps users detect any irregularities in the process. AMAT EMAX etch/ash machine utilizes a chemical etch process to create shallow-diameter openings, patterns, and shapes. The chemical etch creates a uniform etch depth that provides superior quality and repeatability. APPLIED MATERIALS EMAX tool also features a multi-head linear source stack, which allows the users to program different etch depths for different materials. This helps the users to create uniform etch depths for a wide variety of substrates and applications. EMAX etch/ash asset comes with a variety of advanced safety features, including automatic emergency stop and contour detection to protect the operator from hazardous operations. AMAT / APPLIED MATERIALS EMAX model also has in-line particle detectors which aid users in inspecting the etch for deposits, debris, and inclusions. This helps to prevent unacceptable deposits from entering the process stream. AMAT EMAX equipment is also designed to facilitate fast, easy maintenance and service. It offers quick access to system modules and allows users to easily make changes and perform preventive maintenance. The easy-to-use interface helps users identify and address any issues, allowing them to keep their APPLIED MATERIALS EMAX unit operating at optimal levels. In conclusion, EMAX etch/ash machine offers outstanding performance and flexibility for etching and etch/ash applications. Its built-in safety features and easy maintenance capabilities make it an ideal choice for any etch processing requirements. With its advanced software and precise control, AMAT / APPLIED MATERIALS EMAX tool enables users to customize their process parameters for maximum performance and accuracy.
There are no reviews yet