Used AMAT / APPLIED MATERIALS EMAX #9133082 for sale

ID: 9133082
Dry Etchs, 8" JMF Application: oxide etch Chamber Type/ Location System Configuration BASE Position A Oxide Main Etch Position B Oxide Main Etch Position C Oxide Main Etch Position F ORIENTER Position A Configuration Oxide Main Etch Position B Configuration Oxide Main Etch Position C Configuration Oxide Main Etch System Safety Equipment EMO Switch Type TURN TO RELEASE EMO ETI COMPLIANT EMO Guard Ring INCLUDED Smoke Detector At MF No Skin YES Smoke Detector At Gen Rack YES Smoke Detector At AC Rack YES Water and Smoke Detector ALARM System Labels ENGLISH CHA - CHA - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum CHB - CHB - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum CHC - CHC - OXIDE EMAX Process Kit USED EMAX Oxide Turbo Pump Acatel 1600 Emission Endpoint Type Monocro EMAX Oxide ESC USED Flat EMAX Oxide BIAS RF GEN OEM-28B EMAX Oxide Throttle Dual Butter fly EMAX Oxide Gate Valve Pendlum Gas Delivery Options Pallet Options Valve Fujikin Regulator Fujikin MFC Type AREA FC-780C Gas Panel Pallet A Gas Panel Pallet A Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet B Gas Panel Pallet B Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Pallet C Gas Panel Pallet C Gas Line Requirement Pallet Pallet Gas Line Configuration Pallet Corrosive Gas Line Qty 3 Pallet Inert Gas Line Qty 5 Filter Qty 8 Gas Panel Features Gas Panel Features Gas Panel Features Gas Panel Controller VME I Mainframe General Mainframe Options Facilities Type REGULATED Facilities Orientation MAINFRAME FACILITIES BACK CONNECTION Loadlock/Cassette Options Loadlock Type NBLL W/ AUTO-ROTATION Loadlock Cover Finish ANTI-STATIC PAINTED Loadlock Slit Valve Oring Type VITON Wafer Mapping STD Wafer Out of Cassette Sensor YES Cassette Present Sensor YES Transfer Chamber Options Transfer Ch Manual Lid Hoist YES Robot Type CENTURA HP+ ROBOT Wafer On Blade Detector BASIC Loadlock Vent BOTTOM VENT Front Panel Front Panel ANTI-STATIC PAINTED Signal Light Tower 4 COLOR SIGNAL LIGHT TOWER INCLUDING RED LIGHT 4 Color Signal Light Tower Configuration Top Light Color RED Second Light Color YELLOW Third Light Color GREEN Fourth Light Color BLUE Signal Light Tower Buzzer ENABLED Second Signal Light Tower YES Remote System Controller Controller Type 86 INCH COMMON CONTROLLER Cntrlr Electrical Interface BOTTOM FEED Controller Exhaust TOP EXHAUST Controller Cover Option YES System Monitors System Monitor 2 TTW / different cable lengths Monitor Cursor 2 BLINKING CURSOR AC Rack GFI 30mAMP AC Rack Types 84 INCH SLIM AC GEN RACK Exhaust Collar 84 INCH SLIM RACK EXHAUST COLLAR Umbilical Ctrlr to Mainframe Umbilical 25Ft HX Control Cable Length 50Ft Heat Exchanger Hose Length 65Ft Pump Cable Length 65Ft RF Generator Cable 65Ft Pump Interface Only Pump Interface Qty Interface Only
AMAT / APPLIED MATERIALS EMAX is an industry-leading etcher/asher designed for the deep-etch and shallow-etch permalloy deposition process. It is a robust and reliable equipment that offers superior accuracy and performance for the etch/ash process. With its high flexibility and precision control, AMAT EMAX is an ideal solution for deep-etch and shallow-etch permalloy deposition. APPLIED MATERIALS EMAX etch/ash system utilizes a dual-axis magnetic-field-controlled source to precisely control the application of the exposed process material. The source applies the process material to the substrate while the substrate is held firmly against EMAX source head, preventing slippage during the etching process. This ensures an accurate, uniform application of the process material. AMAT / APPLIED MATERIALS EMAX unit features built-in software that allows users to customize the process parameters to best fit the desired results. The software also provides real-time data and feedback on the status of the etch/ash process, which helps users detect any irregularities in the process. AMAT EMAX etch/ash machine utilizes a chemical etch process to create shallow-diameter openings, patterns, and shapes. The chemical etch creates a uniform etch depth that provides superior quality and repeatability. APPLIED MATERIALS EMAX tool also features a multi-head linear source stack, which allows the users to program different etch depths for different materials. This helps the users to create uniform etch depths for a wide variety of substrates and applications. EMAX etch/ash asset comes with a variety of advanced safety features, including automatic emergency stop and contour detection to protect the operator from hazardous operations. AMAT / APPLIED MATERIALS EMAX model also has in-line particle detectors which aid users in inspecting the etch for deposits, debris, and inclusions. This helps to prevent unacceptable deposits from entering the process stream. AMAT EMAX equipment is also designed to facilitate fast, easy maintenance and service. It offers quick access to system modules and allows users to easily make changes and perform preventive maintenance. The easy-to-use interface helps users identify and address any issues, allowing them to keep their APPLIED MATERIALS EMAX unit operating at optimal levels. In conclusion, EMAX etch/ash machine offers outstanding performance and flexibility for etching and etch/ash applications. Its built-in safety features and easy maintenance capabilities make it an ideal choice for any etch processing requirements. With its advanced software and precise control, AMAT / APPLIED MATERIALS EMAX tool enables users to customize their process parameters for maximum performance and accuracy.
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