Used AMAT / APPLIED MATERIALS Enabler E2 #293589575 for sale

AMAT / APPLIED MATERIALS Enabler E2 platform is an advanced etch/ash processing equipment. It is used for challenging etch and ash applications and consists of two independent chambers for improved flexibility. The first chamber serves as an etcher and the second as an asher. The chambers can be independently configured and operated, making them suitable for use in tandem processes. The chamber has a loadlock, which is used to transfer wafers in and out of the chamber, allowing them to be processed in a batch. It also has an integrated vacuum system that ensures consistent, repeatable processing conditions. AMAT Enabler E2 platform is designed to provide high levels of process control, which helps achieve repeatable results. It utilizes multiple tools to monitor process conditions such as temperature, pressure, and RF power, as well as a comprehensive set of chamber-control systems such as pressure, temperature and RPM control. This ensures the proper material removal rate and uniformity. The unit is designed for a variety of applications, such as copper-etching, silicon-etching, and wafer-etching. It also works with various materials, such as silicon, germanium, and low-k dielectric materials. The platform provides exceptional etch uniformity for demanding applications such as high-aspect-ratio etching, deep-trench etching, and selective etching. APPLIED MATERIALS Enabler E2 platform is easy to use and maintain, with all process parameters easily adjustable from the front panel, as well as data automatically displayed on a high-resolution LCD monitor. The machine has a variety of built-in safety features and protections, including thermocouple and temperature sensor controls, in-line particle monitoring, and close loop gas distribution. In conclusion, Enabler E2 platform is an advanced etch/ash processing tool designed to provide high levels of process control and uniformity. It is suitable for both etching and ashing a wide variety of materials, with numerous features ensuring reliable, consistent results.