Used AMAT / APPLIED MATERIALS Enabler E2 #9231969 for sale
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AMAT / APPLIED MATERIALS Enabler E2 is a full-featured asher/etcher that is designed to meet a variety of process engineering needs. The E2 is a high-performance, precision equipment manufactured to precise quality standards to ensure robust process control and accurate reproducibility. It features a high-resolution onboard spectrometer, allowing for real-time monitoring of the etching process. The E2 provides uniformly etched results across an extremely wide resistivity range using a combination of dual frequency RF bias and medium frequency (MF) current. The etch system uses a chopped microwave energy source to ensure uniform etch depth and profile throughout the entire trench or via by modulating the power for multi-depth or 3D etching. Additionally, the E2 features an individually controllable EDGE etcher with programmable programmable geometries for increased recipe flexibility. Additional features include fully integrated helium atmosphere and gas flow control as well as an onboard integrated plasma conditioning module that monitors the plasma conditions automatically to ensure precise etching results. For maximum process control, the E2 provides a single-chamber design that eliminates contamination between runs and reduces cycle times. Integrated safety systems for the E2 include an integrated digital RF generator, as well as a safety interlock unit and isolation grounding device. The E2 also features an integral cooling machine for maximum uniformity and includes independent process controllers, wafer temperature management systems, and a CDA loop for faster tool availability. For greater process control, the E2 offers real-time plasma monitoring using the onboard spectrometer. By combining the latest process control features with precision machined parts, AMAT Enabler E2 offers an exceptional platform for process engineers looking for a reliable, repeatable tool for a variety of etching needs. In addition to its advanced features, APPLIED MATERIALS Enabler E2 provides exceptional value with its long service life, fast basic cycle times, and low cost of ownership.
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