Used AMAT / APPLIED MATERIALS Enabler E2 #9236843 for sale
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AMAT / APPLIED MATERIALS Enabler E2 is an etcher and asher equipment designed for the advanced semiconductor manufacturing industry. It is specifically designed to provide optimal cost-to-performance performance for etching and ashing. AMAT Enabler E2 employed ultra-short pulse laser technology combined with advanced software controls, allowing for fast, precise, and repeatable results. For etching operations, APPLIED MATERIALS Enabler E2 uses a short-pulsed laser to remove material up to 0.7 microns in thickness with high throughput. The laser beam is able to accurately pattern features without the surface damages commonly associated with other etching technologies. The system is reported to offer excellent process uniformity and high consistency, thanks to a laser beam that is delivered to the target with a spot size of approximately 10 µm. For ashing operations, Enabler E2 utilizes a pulsed laser plus oxygen to remove polymeric residues from the substrate. This process's high throughput is achieved by the laser's low beam spot size, allowing for uniform and repeatable results up to 0.7 µm in thickness. The result is clean and debris-free etched patterns that allow precise down-stream operations. AMAT / APPLIED MATERIALS Enabler E2's control unit is also designed with ease of use in mind. The user-friendly interface features a graphical interactive map and parametric recipe design to reduce recipe development time. AMAT Enabler E2 is designed to be an easy to learn, easy to use, and highly reliable machine perfect for both research and production environments such as semiconductor and AUV production.
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