Used AMAT / APPLIED MATERIALS G5 MESA EFEM #9311364 for sale

AMAT / APPLIED MATERIALS G5 MESA EFEM is an advanced etch/ash technology that is used to fabricate integrated circuit components. It is equipped with the latest tooling and automation technology from AMAT company, allowing for high precision etching and ashing. AMAT G5 MESA EFEM equipment is designed to process wafers with up to 200mm diameter and 300mm long. It features ultra-high throughput with through-put rates up to 1000pcs/hour. It also provides greater control and precision in etching and ashing with its unique Dual Chamber Technology enabling sub-um process accuracy. The intelligent control systems, which provide configurable recipes for different wafer sizes, optimize yield and minimize defects. In addition, APPLIED MATERIALS G5 MESA EFEM system offers superior process uniformity and productivity, with a wide range of wet chemical etching solutions, including hydrochloric acids, sulphuric, phosphoric, and other acids. Its wet passivation feature controls oxidation, and allows for improved structure/surface quality of tiny etched structures or micro-features. Its low-pressure chemical vapor deposition (LPCVD) and plasma enhanced chemical vapor deposition (PECVD) capability also helps in improving surface finish of the wafer and makes it more durable. G5 MESA EFEM unit incorporates sophisticated automation solutions that allow for precise process control during fabrication. It includes automated wafer centering and loading, process monitoring, and recipe management to make complex etching and ashing operations efficient. Its safety features guarantee safety to personnel and equipment, with automated gas-sensing systems that are designed to detect dangerous levels of certain toxic gases such as ammonia and hydrogen chloride. To ensure reliable process quality, AMAT / APPLIED MATERIALS G5 MESA EFEM utilizes industrial-grade sensors and optics for precise wafer scanning, along with real-time surface monitoring and reporting that allow for dynamic process control. It also includes a six-axis robot for automated handling operations, designed with safety features to protect personnel from harm. In addition, AMAT G5 MESA EFEM integrates with other processing equipment in an advanced process monitoring machine for greater control and quality. Its flexible integration allows for streamlined production and enhances the overall tool efficiency. This advanced etching and ashing asset is an ideal choice for today's leading production lines.