Used AMAT / APPLIED MATERIALS G5 #9298595 for sale

AMAT / APPLIED MATERIALS G5
ID: 9298595
Vintage: 2007
System 2007 vintage.
AMAT / APPLIED MATERIALS G5 is an advanced etching and ashing tool designed for high speed, ultra fine feature etching and ashing, allowing for improved wafer yields and cost savings when processing semiconductor wafers. It features a high speed magnetically coupled sputtering equipment that allows for fast etching/ashing of circuits, as well as high-precision patterning processes with tight critical dimensions. AMAT G5 can operate in both wet and dry modes, and utilizes a low-pressure system for excellent process control. It is constructed with extensional integrity to provide a reliable repeatable device. The etching and ashing processes can be accurately monitored and controlled through an integrated software unit allowing for precise control over the etch recipe and ashing process. APPLIED MATERIALS G5 applies slurry to the wafer and uses a highly advanced control program to ensure uniform and precise application. An adjustable etch rate provides maximum etching without causing bead formation or contacting the wafer. This permits significantly improved wet-etch uniformity and higher etdoor walls, and decreases particle generation. G5 also offers a programmable P-CVD process which can apply materials such as nitride, poly-Si, oxide, etc., on the wafer. The P-CVD feature of AMAT / APPLIED MATERIALS G5 enables rapid, accurate deposition and double-side deposition on the wafer. With its integrated pressure control machine, the process can precisely deposition material onto small and complex features without smearing or melting them. AMAT G5 is fully automated with an advanced HMI interface for easy and intuitive wafer check in and out process while monitoring real-time tool parameters, as well as storing the recipes. It also provides customizable parameters for stress-free process recipe setups. APPLIED MATERIALS G5 is a robust and reliable etching and ashing solution for manufacturing semiconductor devices. Utilizing a sophisticated, yet user-friendly HMI interface, G5 provides accurate process control and improved yields for improved performance, cost savings, and reliability.
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