Used AMAT / APPLIED MATERIALS G5 #9399903 for sale

AMAT / APPLIED MATERIALS G5
ID: 9399903
Vintage: 2011
System 2011 vintage.
AMAT / APPLIED MATERIALS G5 Etcher / Asher is a multi-chamber, single-wafer etcher / asher that offers advanced performance for etching and ashing processes. This reliable and low-maintenance machine features proven, high-precision technologies that are optimized for complex etch/ash process steps and challenging materials. With its unique configurability and high throughput, AMAT G5 etcher/asher is the ideal tool for semiconductor device fabrication. APPLIED MATERIALS G5 Etcher/Asher features a multi-chamber design that makes efficient use of the available space, and is fully integrated and self-contained for easy installation. It is capable of delivering superior process uniformity and high throughput, with up to 500 wafers per hour. G5 also provides high throughput and low cost of ownership using AMAT Turbo Technology along with its maximum capacity of three types of gases and two types of temperature controllers. AMAT / APPLIED MATERIALS G5 Etcher/Asher is equipped with advanced automation capabilities, yielding enhanced reliability and higher yields through intelligent process control. It offers recipe flexibility and cost-efficiency by enabling users to configure the etcher/asher to multiple recipe options, and is designed to reduce space requirements and reduce dependency on other equipment. In addition, AMAT G5 incorporates several safety features, such as built-in sensors and an automatic shutoff system, which are designed to protect personnel and equipment. APPLIED MATERIALS G5 Etcher/Asher has also been designed to maximize materials compatibility, allowing it to easily process a wide range of substrates, including single crystal Si, III-V compounds, wafer carriers, and epoxy resins. It has a superior etch rate for all materials regardless of the substrate type, and its single-wafer capability allows for easy etching of substrates of varying thickness and sizes. G5 also utilizes advanced thermal controls, allowing for maximum recipe flexibility while maintaining consistent film uniformity and thickness. AMAT / APPLIED MATERIALS G5 Etcher/Asher supports a variety of processes including mask etch/ash, wet etch, dry etch, and strip etch/ash processes. These processes can be configured to allow total process control and flexibility over etching and ashing operations. The machine also features a closed-loop gas system that reduces the amount of wasted reagents, and increases the process time. In addition, AMAT G5 is designed with a compact size that eliminates the need for an additional chamber, and its low paper consumption rate helps reduce costs.
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