Used AMAT / APPLIED MATERIALS Gas box for Centura DPS II #9407675 for sale

AMAT / APPLIED MATERIALS Gas box for Centura DPS II is a high-performance etcher/asher designed for use with Centura DPS II systems. It is designed to provide reliable, consistent performance with a process-filtered, heated and humidified gas delivery equipment. This ensures accurate, homogeneous etching and ashing of thin film materials on substrates up to 5 inches wide. The gas box has an advanced control panel that provides precise control of all the parameters and conditions needed for an ideal deposition process. The gas box is designed for a wide range of etching and ashing applications, such as oxide etching, polyimide etching and ashing, mass-selective etching, and 2D pattern ashing. It has a vacuum platen with automatic centering, adjustable height and cantilever positioning to provide superior etching and ashing uniformity. The gas box includes a heated and humidified stage system that prevents condensation on the substrate or the stepper alignment optics. It also includes a process-filtered gas control unit that includes independently-controlled gas bonnets and a gas mixer that can support up to six different gases. The machine also includes five thermal isolation valve assemblies which help reduce the effects of cross-contamination. In addition, it features a taperless beaker for holding liquid etchants and a gas drain for safe removal of etchant. AMAT Gas box for Centura DPS II is an advanced etching and ashing tool able to provide high-quality, precise results for a variety of applications. It is designed for ease of use, safety and accuracy, with features such as process-filtered gas delivery, heated and humidified stage tool, thermal isolation valve assemblies and a taperless beaker for liquid etching. This ensures reliable and consistent performance in thin film material etching and ashing.