Used AMAT / APPLIED MATERIALS Gas box for Centura DPS II #9407676 for sale
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ID: 9407676
AMAT Centura DPS II Gas Box is a critical component to the Centura DPS II etcher/asher. It is an enclosed gas box designed to contain and provide the etcher with precise gas inputs for clean, precise etch and ash processes. APPLIED MATERIALS Centura DPS II Gas Box is made of stainless steel, creating a durable and reliable structure. The box features two ports. One is the inlet port that supplies gases to the chamber, and the other is the outlet port that efficiently vents out the used gases. With this box, the Centura DPS II can use two to three different etching or ashing gases at once, allowing users to customize their processes. The box also has a gas switching valve which provides accurate control of the gas flowing between the gas box and the etcher chamber. The valve is also designed for a manual gas flush option, which is important for maintaining process consistency. To maintain the box's integrity and prevent potential leaks, all of the lines passing through the box are equipped with O-rings and other sealing materials. Additionally, AMAT / APPLIED MATERIALS Centura DPS II Gas Box features a backside scrubber, which is instrumental in the etcher's process stability. This scrubber is responsible for removing trace amounts of corrosive gases from the exhaust gas stream of the machine. The scrubber also helps to protect other system components from harmful corrosive gases. Finally, the gas box is designed with an intuitive control panel. This panel allows manual inputs, allowing advanced users to control the etching gas flows and pressures by adjusting the inlet pressure, flow rate and vacuum pressure. These functions can also be automated via the panel to enable process optimization. Overall, AMAT Centura DPS II Gas Box is a reliable, user-friendly gas box. Its stainless steel construction, gas switching valve, backside scrubber and intuitive control panel make it a simple and safe system for etching and ashing processes.
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