Used AMAT / APPLIED MATERIALS Gas box for Centura DPS II #9407679 for sale
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ID: 9407679
AMAT / APPLIED MATERIALS Gas box for Centura DPS II is a reliable, precision etcher and asher equipment. This system is used in the semiconductor industry to create microscopic electronic devices and components. The etcher and asher process is used to transfer patterns onto the surface of a substrate by removing material from the substrate through the use of reactive gases. The unit features a stainless steel chamber designed for reliable processing for up to 150mm wafers. The chamber is sealed and features advanced gas flow control as well as integrated safety systems for total process control. This unit is equipped with a Centura DPSII process controller, which offers an integrated gas panel for precise gas distribution and front panel control buttons providing easy access to machine menus and settings. This tool also offers event logging, diagnostics, and fault type display capabilities. AMAT Gas box for Centura DPS II is fully integrated with an advanced PLC control asset, allowing the direct control of the model's processes and sequence. The PLC control equipment also offers advanced fault detection, as well as safety and environmental functions. The system is equipped with a pressure regulator to monitor and control the chamber pressure, as well as a gas manifold that is used to precisely mix and flow process gases according to a programmed recipe. The unit also features a built-in recipe management unit, allowing the operator to quickly retrieve, modify, or create new recipes as needed. APPLIED MATERIALS Gas box for Centura DPS II is designed to handle up to three process gases, offering a highly reliable and efficient etching and cleaning solution. The machine is designed to be customizable and user-friendly. It can be easily integrated into a variety of systems and automation processes. Its highly advanced features will ensure reliable operation throughout the entire wafer processing process.
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