Used AMAT / APPLIED MATERIALS Gas box for Centura DPS II #9407681 for sale
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ID: 9407681
AMAT Centura DPS II Gas Box is an etcher/asher designed for operation in a high vacuum environment. The gas box is constructed from stainless steel and is designed to provide precise and reliable control of the flow of etching gases used in semiconductor fabrication processes. Through precise and accurate control of the flow of reactive gases, the Centura DPS II allows for production of high-quality, defect-free semiconductor devices. The gas box employs two independent gas distribution manifolds, each controlling an independent number of process gas lines. These lines enable delivery of up to nine process gases, including etch, clean, anneal, or deposition gases. An integrated leak rate detection equipment monitors and records gas consume levels, while an advanced control system enables precise control of the proportioning of each gas. The unit also features integrated RFID Gas Identification and automated verification of incoming gas cylinders, as well as integrated heaters to ensure precise temperature control of the process gases. The Centura DPS II gas box also offers superior safety features. Software alarms can be customized to alert operators if unsafe chemical levels are detected, while an innovative ultra-low purging capability reduces hazardous by-products. The machine also features automatic venting of any over-pressurized lines, ensuring safe operation. Finally, the Centura DPS II gas box makes operation straightforward and user-friendly. The on-board controller, combined with an intuitive graphical user interface, facilitates efficient operation and quick process development. This control tool also enables the efficient management of process recipes, with downloading and saving of up to 2000 recipes. Overall, APPLIED MATERIALS Centura DPS II gas box is an ideal solution for controlling the flow of etching gases and producing high-quality, defect-free semiconductor devices in a high vacuum environment.
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