Used AMAT / APPLIED MATERIALS Hart #9225943 for sale
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AMAT/AMAT / APPLIED MATERIALS Hart is an advanced etcher and asher equipment, designed to provide precise and repeatable etching of semiconductor wafers. The system is capable of processing up to four 300mm wafers at once with both etching and ashing capabilities. The unit is equipped with a custom-design heated chuck which ensures pre-determined and uniform thickness of the etch/ash deposited on the substrate. AMAT Hart machine utilizes the magnetically assisted chemical etching (MAC-Etch) process, which ensures accurate and uniform etching of the wafers. This process utilizes the application of intense electromagnetic fields to create controlled and controllable etching of the substrate. Using this process, APPLIED MATERIALS Hart can achieve etching applications with a resolution of less than 1 nm. In addition, the MAC-Etch process produces very low poly-grain residuals compared to conventional etching processes. In addition, the tool is capable of performing spin-on-glass (SOG) deposition, a time-saving process designed to deposit an oxygen or silicon-containing layer on the substrate. This is an advantageous process as it results in improved adhesion to the substrate and improved etch uniformity. Hart asset is also equipped with a laser thermal processing model, which is used for completing the etch/ash process faster and with fewer process steps. The laser thermal processing equipment increases accuracy of etching and ashing, produces better substrate finishing, and improves the overall uniformity of the process. The system is also integrated with a data monitoring unit which allows for collected process and product data to be stored and monitored. This allows users to adjust process parameters and parameters to improve process uniformity and precision. Finally, the machine is designed for ease-of-use with an intuitive user interface. This enables users to quickly program process recipes and control their etching and ashing processes. Overall, AMAT / APPLIED MATERIALS Hart tool is a powerful and reliable asset for etching semiconductor wafers with accuracy and speed.
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