Used AMAT / APPLIED MATERIALS Mark II chambers for P5000 #293590702 for sale

AMAT / APPLIED MATERIALS Mark II chambers for P5000 etch and ash systems offer manufacturers a highly-sealed, pressurized process environment. Designed for production use in semiconductor fabrication, the Mark II chambers offer excellent design characteristics and convenience for efficient operation, maintenance and cleanliness. With a variety of process related features, the Mark II chambers provide for efficient, repeatable and accurate control of etch and ash processes. The Mark II is equipped with a number of layered chambers, which define the process environment. The first two layers contain RF shielding, which isolates the RF waveforms and plasma concentrations during etch and ash processes. The third layer is a stainless steel box that houses two thermally insulated stations. The first station houses the gas manifold, gas distribution equipment and gas lines; the second station houses fluid metering pumps and the RF generator. Inside the fourth layer is the process pedestal, which supports the wafer and susceptor during processing. The fifth layer is an electro-magnetic interference (EMI) shield that protects the outside environment from contamination and the system from other equipment interference. The Mark II etch and ash systems also feature a series of programmable features, made possible by the Process Flow Manager (PFM) software. The PFM is a comprehensive programming language that allows for easy integration with other systems, as well as custom looping scenarios and batch recipes. Additionally, the Mark II chamber includes a series of tool diagnostics, which allow for detailed process troubleshooting. The Mark II etc and ash systems also offer excellent safety features. The unit is equipped with a fast-acting interlock machine, designed to react to any sudden or unexpected pressure changes or plasma arcing. In the event of an arcing condition, the interlocks will automatically shut down the tool to prevent further damage. Overall, AMAT Mark II chambers for P5000 etch and ash systems are an excellent option for manufacturers who require a fast, efficient and reliable process environment. With its advanced design characteristics and comprehensive programming language, the asset allows for excellent etch and ash process control, improved productivity levels and improved model safety. Ultimately, the Mark II chamber is an essential part of any modern manufacturing equipment.