Used AMAT / APPLIED MATERIALS / MKS DPS II AE Minos #9399337 for sale
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AMAT / APPLIED MATERIALS / MKS DPS II AE Minos is a state-of-the-art etcher/asher equipment that is commonly used to create high-precision structures from various substrates. It is capable of etching and ashing with a high degree of accuracy and precision by using an advanced, multi-chamber low-pressure pulsed inductively-coupled plasma (ICP) source. The system is capable of etching small features down to 2 μm and utilizes an advanced, high-RL, ionized etch-fill process to ensure the highest precision is achieved. MKS DPS II AE Minos features a configurable process chamber, a large viewport, and a set of RF crossovers to provide uniform etching across the entire wafer surface. The unit's inductively coupled plasma (ICP) source employs a low-pressure pulsed operation to optimize etching parameters while minimizing hazardous plasmas and byproducts. The high-RL ICP source is capable of plasma etching features down to 2 μm - providing leading edge accuracy and precision. AMAT DPS II AE Minos also provides a unique, inductively-coupled plasma (ICP) etch-fill process. This process optimizes etch parameters to provide a high-RL etch profile and accurate feature controls. The etch-fill process ensures uniformity and consistency across the wafer surface during the etching process. In addition, this machine offers a user-friendly, reliable, and versatile software package for controlling the process with ease. This software package includes the DPS 2.0 Process Control Tool, which includes recipe development and control, machine hardware diagnostics and status, and performance monitoring and reporting features. This asset is further backed by MKS global service and support model. Finally, APPLIED MATERIALS DPS II AE Minos offers a range of versatile wafer handling and transfer capabilities. This equipment is designed to handle 6", 8", and 12" wafers within a single transfer system, allowing for ultimate flexibility and convenience in times of changing requirements. In conclusion, DPS II AE Minos is an advanced etcher/asher unit that is capable of processing wafers with a high degree of accuracy and precision. This machine is fully featured and integrates a user-friendly software package for process control and optimization, as well as offering a range of versatile wafer handling and transfer capabilities.
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