Used AMAT / APPLIED MATERIALS Tetra #293633171 for sale

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ID: 293633171
System Part number: 0010-45807.
AMAT / APPLIED MATERIALS Tetra is a state-of-the-art etcher / asher designed to provide superior results. This equipment integrates four distinct processes designed to enable high-speed etching and ashing of a variety of materials. AMAT Tetra combines plasma etching, RIE (reactive ion etching) and ashing, O2 etching and ashing, and wet etching and ashing. This advanced system is capable of both surface and depth etching, providing flexible and efficient processing capabilities. APPLIED MATERIALS Tetra utilises an advanced PECVD (plasma-enhanced chemical vapor deposition) process for etching and ashing of surface materials. This unit can enable etching and ashing at low temperatures and pressures, yielding superior process results. Tetra is designed to enable extremely rapid processing times, providing users with unsurpassed throughput and data acquisition rates. This machine is highly efficient, with a high rate of material utilization and extremely low operating costs. AMAT / APPLIED MATERIALS Tetra also offers an advanced reactive ion etcher / asher, based on an etched/ ashed process that uses various gases such as Oxygen, NF3, CHF3, and Ar. This tool is designed to provide extremely uniform etching across multiple surfaces, as well as extremely precise control over etch depth and selectivity. Wet etching and ashing is also supported by AMAT Tetra, allowing for improved productivity in large-scale applications. This asset enables users to achieve etch rates faster than with conventional wet processing, reducing cycle times and providing users with superior results. APPLIED MATERIALS Tetra offers a range of automation and process control options to ensure maximum flexibility and efficiency. This model is designed to provide superior process repeatability and reliability, and is compatible with existing physical and chemical process chambers. Tetra also offers an integrated chamber closure equipment, providing enhanced safety and operation without the need for additional containment. AMAT / APPLIED MATERIALS Tetra is an advanced system that is designed to provide superior etch / ashing performance. This unit provides users with superior process results by combining the four distinct processes of plasma etching, RIE, O2 etching, and wet etching and ashing. This machine is capable of both surface and depth etching at low temperatures and pressures, with excellent process repeatability and reliability. AMAT Tetra also offers flexible automation and process control options, as well as an integrated chamber closure tool for enhanced safety and operation.
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