Used ANATECH / TECHNICS 600-Series #9123994 for sale

ANATECH / TECHNICS 600-Series etchers or ashers are versatile machining systems specifically designed for the process of etching or ashing substrates. ANATECH 600-Series etcher/asher systems offer maximum performance and flexibility, allowing production runs of even the most complex designs efficiently and reproducibly. The equipment features a proprietary 1200W RF generator, quartz plasma chamber, customizable processes, quick and easy recipe programming, low-pressure control, and other advanced capabilities. TECHNICS 600 SERIES system is able to etch a variety of materials including metals, polymers, glasses, semi-conductors, and thick films. The unit is designed for both laboratory and production runs, and offers an adjustable throughput range of up to 600 wafers per hour. It's an Arc-Gap (AGAP) machine that utilizes a proprietary "tunable" plasma gap technology to deliver superior etching performance with precise repeatability. This eliminates the need for costly wafer movement and troublesome focus control. 600 SERIES tool also features an intuitive console-based software that provides intuitive operator guidance and control. This software is capable of controlling recipe settings, plasma parameters, substrate motion, temperature control, gases, and other critical process parameters. A flexible programming asset allows users to quickly upload recipes and experiment with different parameters to generate the best results. 600-Series model is capable of etching and ashing with a wide range of etch chemistries in a controlled, safe environment. For etching applications, the equipment uses an automated, multi- gas injection system that is ideal for enhanced sensitivity, accuracy, and control. The unit also offers a variety of gas cleaners and recombiners that enable precise control of the etching environment. In addition to etching and ashing, TECHNICS 600-Series machine is designed to handle a wide range of sputter processes. The tool is compatible with a variety of sputtering targets and substrates, such as metallic alloys and silicon layers. Its sputter process control capabilities enable users to easily get the desired deposition thicknesses and profiles. ANATECH 600 SERIES asset offers a number of other features including volume chambers, automated vision, sub-micron wafer resolution, and an optional double-oven cassette model. This advanced etcher/asher equipment is a complete turnkey solution that maximizes productivity, flexibility, and reproducibility.