Used APS / ADVANCED PLASMA SYSTEMS B-Series #9390804 for sale
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APS / ADVANCED PLASMA SYSTEMS B-Series is an advanced etcher/asher designed for a wide range of applications, including microelectronics, opto-electronics, and MEMS. APS B-Series is equipped with a variety of advanced Plasma Sources which are used to etch substrates with precision and accuracy. ADVANCED PLASMA SYSTEMS B-Series features a vacuum chamber that is capable of producing and controlling the desired Process pressure, to ensure an optimal etching process. The etching process can be monitored and performed in real time with the help of a built-in DC/RF Generator that allows for precisely controlling the energy of the Plasma Source, to match the process needs. B-Series also provides a unique Gas Controller, allowing for instant setting and monitoring of the Gas Flow parameters. APS / ADVANCED PLASMA SYSTEMS B-Series is loaded with safety features to ensure user safety and equipment protection. These features include: a central Vacuum Pump for evacuating the chamber to a safe atmosphere, and a high-pressure Emergency abort button for automatically de-energizing the Plasma Source to prevent accidental damage. APS B-Series also features an optimized design to reduce any potential contamination introduced by the process or to the process. This includes an Anti-Contamination System that injects a low level of Nitrogen into the chamber in order to prevent any potential substrate contamination. ADVANCED PLASMA SYSTEMS B-Series is designed to provide optimal etch performance. The Plasma Source is able to finely process the substrate with high precision and minimal damage. Due to the flexibility of B-Series, multiple etching techniques can be used: Drywet Surface Processing, Magnetron Sputtering, and Modified Glow Discharge. APS / ADVANCED PLASMA SYSTEMS B-Series also has the ability to perform both RIE (Reactive-Ion-Etching) and RBO (Reactive-Bulk-Oxide-Etching) techniques. The ability to perform two techniques allows for faster processing times and higher throughput. APS B-Series is an advanced etcher/asher designed for achieving the most accurate and consistent results in etching. The advanced features allow for precise control of the plasm, as well as automated safety features for preventing contamination. With its flexible design, ADVANCED PLASMA SYSTEMS B-Series can be used for a wide range of applications. It is the perfect solution for a variety of etch workshops.
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