Used AST / ADVANCED SYSTEM TECHNOLOGY CIRIE-100 #9059485 for sale

Name: AST / ADVANCED SYSTEM TECHNOLOGY CIRIE-100
Brand: AST / ADVANCED SYSTEM TECHNOLOGY
SKU: 9059485
Availability: InStock

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Etchers / Ashers

Manufacturer

AST / ADVANCED SYSTEM TECHNOLOGY

Model

CIRIE-100

ID: 9059485

Wafer Size: 2 to 8

Vintage: 2012

ICP-RIE system, 2"-8" Specifications: Chamber Materials: Anodized Al 6061T6 ICP Power: 1000 ~ 2500 W (Option) Bias Power: 300 ~ 600 W (Option) Wafer Numbers / Size: (13 - 1) pcs / (2"- 8") Gas Lines with MFCs: 6 Standard Lines Plasma Density: > 1E+11 ions/cm3 Reactor Base Pressure: < 1E-6 Torr Process Pressure Range: From 0.1 to 100 mTorr Substrate Cooling (Option): Chiller ( 5 ~ 35℃), or (RT-150℃) Pumping System: Turbomolecular Pump + Rotary Pump or Dry Pump (Option) Non-Uniformity: 5% for WIW, WTW and RTR Load/Unload (Option): Vacuum Robot Transport Load-Locks Pumping System(Option) : Rotary Vane Pump Load-Locks base Pressure(Option) : < 1E-2 Torr Automatic Control System: Industrial PC with Graphic Control Interface Power Requirement: AC220V, 3 phase, 60 Hz, 100A, Gas Inlet Requirement: 1.2 kgw/cm2 CDA Requirement: 5 kgw/cm2 Water Requirement: 1.5 kgw/cm2, 20。, 25 l/min 2012 vintage.

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AST / ADVANCED Equipment TECHNOLOGY CIRIE-100 is an innovative development in etching/ashing technology. This system provides leading-edge etching/ashing technology to companies with the most demanding requirements. Its cutting-edge technology provides precise structural features as well as increased accuracy and productivity. AST CIRIE-100 can etch/ash both board and panel in one single pass with its advanced process. It utilizes a variety of process gases that allow selective etch depths and material removal resulting in highly accurate and repeatable structures. With its advanced process design, ADVANCED Unit TECHNOLOGY CIRIE-100 accommodates a wide variety of board and panel materials including FR-4, Cem-3, Polyimide, Aluminum, and more. CIRIE-100's motorized height adjustment machine allows for quick and easy tooling change overs with minimal downtime. The tool also features an advanced motion control and drive asset with a high speed scan algorithm that enables faster etch feature resolution. Its tightly integrated, modular design allows for versatile integration and scalability to be tailored to the needs of the customer. AST / ADVANCED Model TECHNOLOGY CIRIE-100 offers a variety of additional features and configurations including an integrated recirculation equipment and an advanced process capability that is configurable to meet different process demands. It has a user-friendly, intuitive controller interface and the capability to generate both manual and programmable recipes. The system runs in automatic, semi-automatic, and manual mode. AST CIRIE-100 also offers a variety of advanced safety features to protect the unit from accidental damage as well as operator safety. These features include integrated interlocks, NFPA safety compliance, and dust expelling capabilities. The machine is CE certified and UL compliant making it safe to use in a variety of industrial applications. Overall, ADVANCED Tool TECHNOLOGY CIRIE-100 provides an advanced etching/ashing solution that is highly reliable and efficient. With CIRIE-100's cutting-edge features and advanced process capabilities, users can achieve precise structural features with increased accuracy and productivity.