Used AST / ADVANCED SYSTEM TECHNOLOGY CIRIE-200 #192121 for sale

ID: 192121
Vintage: 2006
ICP-RIE system Currently installed 2006 vintage.
AST / ADVANCED Equipment TECHNOLOGY CIRIE-200 is an advanced etcher/asher designed to deliver consistent, reliable etching and ashing results in applications requiring precision and accuracy, such as semiconductor processing. AST CIRIE-200 operates on a linear beam system in order to precisely etch and ash with a high degree of uniformity and reliability. This unit allows for the delivery of uniform anisotropic properties, removing layer stackovers or material bridges while producing sharper edges, thus ensuring smooth structuring. The robust design of ADVANCED Machine TECHNOLOGY CIRIE-200 allows it to achieve a high throughput rate, with a maximum etch time of 3 minutes per wafer up to 8" in diameter. This impressive throughput capability is enabled by the linear beam tool, which has a wide dynamic range of energy delivery ensuring that the needs of a wide range of materials are met. The asset features an integrated sub-nanosecond pulse generator which provides instantaneous thermal energy without generating chemical byproducts, making it ideal for use in processing fragile materials. CIRIE-200 is an incredibly versatile model, able to etch multiple layers of materials of varying temperatures and thicknesses. This makes it ideal for specialized etching processes, as the equipment can easily be calibrated to meet a wide range of etching parameters. The system features an intuitive human machine interface (HMI) that provides the user with detailed feedback on unit operations, allowing for easy operation and maintenance. AST / ADVANCED Machine TECHNOLOGY CIRIE-200 is built to stringent safety standards, featuring automatic safety shutdowns in order to prevent tool damage or injury. The asset ensures that both humans and components are safe from potential etching and ashing hazards. The model also features double isolation technology to reduce any potential risks associated with microwave plasma operations. In conclusion, AST CIRIE-200 is an incredibly advanced etcher/asher, ensuring consistently reliable results at a high throughput rate. This combined with its robust construction and versatile calibration capabilities make it an ideal choice for any etching or ashing applications.
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