Used AST / ADVANCED SYSTEM TECHNOLOGY CIRIE-200 #9059484 for sale
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ID: 9059484
Wafer Size: 2 to 8
Vintage: 2012
ICP-RIE system, 2"-8"
Specifications:
Chamber Materials: Anodized Al 6061T6
ICP Power: 1000 ~ 2500 W (Option)
Bias Power: 300 ~ 600 W (Option)
Wafer Numbers / Size: (13 - 1) pcs
Gas Lines with MFCs: 6 Standard Lines
Plasma Density: > 1E+11 ions/cm3
Reactor Base Pressure: < 1E-6 Torr
Process Pressure Range: From 0.1 to 100 mTorr
Substrate Cooling (Option): Chiller ( 5 ~ 35℃), or (RT-150℃)
Pumping System: Turbomolecular Pump + Rotary Pump or Dry Pump (Option)
Non-Uniformity: 5% for WIW, WTW and RTR
Load/Unload (Option): Vacuum Robot Transport
Load-Locks Pumping System(Option) : Rotary Vane Pump
Load-Locks base Pressure(Option) : < 1E-2 Torr
Automatic Control System: Industrial PC with Graphic Control Interface
Power Requirement: AC220V, 3 phase, 60 Hz, 100A,
Gas Inlet Requirement: 1.2 kgw/cm2
CDA Requirement: 5 kgw/cm2
Water Requirement: 1.5 kgw/cm2, 20。, 25 l/min
2012 vintage.
AST / ADVANCED Equipment TECHNOLOGY CIRIE-200 is a premium etching machine designed to meet the demands of professional engineering and electrical applications. This cutting-edge device is capable of producing quick and precise results with exceptional accuracy and precision. AST CIRIE-200 utilizes advanced design and construction principles to ensure each operation runs efficiently. One of the most impressive features is that its automated process runs without any manual intervention, further making the process even more reliable. The machine is equipped with a powerful motor and flexible drive train, which allows it to automatically adjust the cutting speed, blade pressure, and torque. Its superior motion control ensures that its precision and accuracy are maintained at a consistent level even over time. ADVANCED System TECHNOLOGY CIRIE-200 also features a unique air-purged operation that allows for its asbestos-free operation. This function helps protect both operator and products from hazardous dust, particles, and fumes. The machine also features an excellent 5-axis drive unit, which offers superior accuracy and unmatched speed. The skiving table allows for cutting boards from 0.001 inches to 1.500 inches in thickness with an accuracy of ± .0002 inches. This makes it ideal for intricate and detailed etching. In addition to its impressive performance, CIRIE-200 is equipped with a variety of advanced safety features. Its user-friendly interface makes it easy to set up and operate, while its precision automated shutdown feature helps ensure accurate and safe operation. The machine's powerful Emergency Stop feature helps to prevent dangerous situations and protect the operator. To ensure success and exceptional performance, AST / ADVANCED Machine TECHNOLOGY CIRIE-200 is designed to meet all industrial standards with regard to electrical power and data management. The machine is equipped with a reliable temperature and voltage monitoring tool, as well as an air-cooled hydrogen cooling asset for precision performance. The machine also features heavy-duty steel rack mounting, modular construction for quick and easy setup, and ample storage and control cabinets for product management. In summary, AST CIRIE-200 is the ideal etching machine for professional engineers and electrical applications. Its superior motion control and air-purged operation ensure quick, precise, and reliable performance, while its advanced safety features help keep the operator and the product safe. With its rugged steel construction, air-cooled hydrogen cooling, and temperature monitoring model, this etching machine will truly meet any industrial standard.
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