Used AXCELIS / FUSION ES3 #293616813 for sale

AXCELIS / FUSION ES3 is an advanced etcher/asher equipment designed and manufactured by FUSION Technologies. It provides an advanced etch/ash capability in both wet and dry etch/ash processes. FUSION ES3 features a unique dual-chamber design that allows for a wide range of etch/ash parameters to be changed quickly and easily. It is capable of high-throughput processing at rates of up to 35 wafers per hour. AXCELIS ES3 incorporates advanced EPICAL (e-Process Image-Controlled Ashing) technology that allows the system to accurately control etch/ash parameters with a high degree of precision without manual intervention. EPICAL combines wafer imaging, parameters optimization, and a sophisticated process-control unit to ensure optimal etch/ash performance. This technology has proven to provide robust process execution with excellent repeatability, particularly in applications involving high aspect ratios, high layer thickness, and large feature sizes. ES3 is also versatile in terms of its usage environment. It can be configured with a variety of belt configurations, vacuum connections, and hardware setups. This machine also comes with a large, dynamic touchscreen user interface that offers an intuitive and effortless user experience. The screen is designed for easy navigation, providing operators with access to various processes and recipes quickly and conveniently. AXCELIS / FUSION ES3 also offers exceptional safety and energy efficiency. The tool is equipped with a specially designed E-Safe feature which constantly monitors and automatically modulates the power output of the asset. This feature ensures precise etch/ash levels and an extremely low risk of over-etching. Safeguards are also in place to prevent overheating and maintain the model's performance even during high-energy processes. Finally, FUSION ES3 is renowned for its robust process control capabilities. The equipment features a unique Process Monitor that can be used to keep track of the etch/ash process, its recipes, metrology data, and other process parameters in real time. AXCELIS ES3 also offers numerous options for data analysis, data storage, and reporting. All of these features make ES3 one of the most advanced etcher/ashers in the market today.