Used AXCELIS / FUSION ES3 #293822281 for sale

AXCELIS / FUSION ES3 etcher/asher is an advanced advanced-etch equipment with a fully automated cassette-to-cassette substrate handling system for Ultratecxa™ and Accubond™ wafers. With its fully automated wafer transfer unit, FUSION ES3 achieves extremely high-yields while providing the highest levels of process repeatability and stability. AXCELIS ES3 achieves higher throughputs due to its compatible high-throughput susceptor design. The susceptor design has an upper stage well geometry complete with a quartet of RS36 and RS46 slot configurations. These variables contribute to an improved etching process overall, allowing for greater material removal with a significantly reduced particle size. Additionally, ES3 etcher/asher provides superior matching with respect to the etch process. This uniformity in etch rates allows for a higher level of repeatability and control. The etch uniformity is monitored through the use of four corner offsets and eight mid-field photocell sensors. This monitoring machine creates an ultra-fine control over the total etching process. AXCELIS / FUSION ES3 etcher/asher is powered by a proprietary process control software. This software provides centralized control and data management of numerous etching processes, while allowing access of shared process data by multiple users. This platform allows customers to create their own processes or develop parameters from other established processes, providing unprecedented modification and tuning of the etch chamber. FUSION ES3 etcher/asher was designed with safety in mind. It is housed in a fully enclosed vacuum environment, complete with access doors and a removable exhaust port. The containment tool is designed to prevent accidental release of any hazardous by-products from the etching process, as well as to protect workers and equipment from hazardous gases or materials. Overall, AXCELIS ES3 etcher/asher is an advanced high-throughput semiconductor etching and ashing asset. Its susceptor design is intuitive and ergonomic, allowing for greater repeatability and control in the etching process. It has wide process support, safety features, and a convenient operation control model which makes it a great choice for users looking for a reliable, efficient etching equipment.