Used AXCELIS / FUSION G03 #9187639 for sale

AXCELIS / FUSION G03 is a plasma etcher and asher composed of high-tech components and engineered to offer precision etching and ashing technology. It is a compact yet versatile machine that combines the capabilities of both etching and ashing in a single, high-performance package. FUSION G03 is ideal for resolving challenging etching and ashing needs for multi-material processes in a variety of industries and fields. AXCELIS G03 features many advanced features, including a powerful ion source with a magnetically ignited arc, allowing for scalable power density from low to high levels. This provides greater process flexibility to address all etching needs across multiple material surfaces. Its advanced linear ion source design also enables more uniform and controllable etching with improved chemical distribution to achieve optimal etching results. The device is capable of fast etching rates, with speeds of up to 30 nm/min in production runs. G03 is equipped with a unique two-zone process chamber that ensures excellent etching uniformity even in large production runs. Its modular design allows for easier maintenance and operation. A humidity sensor system helps to prevent contamination, and a convection cooling system helps keep process temperatures in check. The device is also integrated with a variety of monitoring and diagnostic systems, providing users with an in-depth understanding of the etching process. AXCELIS / FUSION G03 can be operated in either manual or automated mode, with both enabling remote monitoring and control capabilities. It is equipped with the latest in processing technology, including an automatic end-point sensing algorithm that monitors etching end points in real time. The device also maintains a log of etch results that can be downloaded to provide detailed information about the process. Its user-friendly features, including an intuitive UI and integrated touchscreen display, make FUSION G03 perfect for staff with less technical expertise. Its safety features include a removable key for preventing unauthorized process start-ups. The device is also built with a robust protective housing that shields it from dust and other particles. Overall, AXCELIS G03 is an incredibly reliable, high-performance plasma etcher and asher designed to meet the needs of various industries and fields. Its innovative design offers a wide range of process capabilities, enabling repeatable, dependable results.