Used AXCELIS / FUSION G03 #9187640 for sale

AXCELIS / FUSION G03 is an advanced etcher and asher designed to meet the needs of today's advanced semiconductor production. It is a multi-station, multistage process tool that allows users to etch, asher and anneal various materials to produce precise patterns with excellent precision and repeatability. FUSION G03 features a robust construction and a reliable automation equipment, making it ideal for the production of a wide variety of complex components. AXCELIS G03 has a 300mm full-process chamber that combines etching, ashing and annealing operations in a single solid state unit. This ensures a consistent process environment, even for intricate designs and intricate fails in the manufacturing process. It has a very versatile and robust automation system with precise, real-time control of process parameters such as pressure, flow rate, temperature and gas mixtures. G03 utilizes a wide variety of etch and asher recipes to finely control the etching process, guaranteeing that all parts are accurately shaped and meet stringent design requirements. The machine is a full-field capacitively coupled etcher and asher and includes a feature set that allows it to handle a wide range of materials and processes. Axial and radial anisotropy is built into the unit, allowing for tight control of single-tailed and overcut critical dimensions. The advanced safety features of AXCELIS / FUSION G03 ensure operator safety at all times, making it a great choice for production in high risk areas. The integrated safety machine features temperature monitoring, cooling water systems, and emergency shut-down procedures. Additionally, the machine is designed to meet the strictest safety regulations, providing a safe working environment for operators. FUSION G03 is a highly efficient, reliable, and repeatable etcher and asher. It is an excellent choice for production of a wide variety of intricate components, and its reliable automation tool ensures a smooth and fast production process. Its robust construction and integrated safety systems make it ideal for use in today's demanding semiconductor production environments.