Used AXCELIS / FUSION G03 #9187678 for sale

AXCELIS / FUSION G03 is a high-performance, mid-size etcher/asher designed for the production of semiconductor devices with excellent results. This equipment provides maximum process flexibility and fast run times and offers an advanced control and monitoring system to ensure the highest levels of quality and responsiveness. This etcher/asher uses chlorine-based chemistry in an etching unit containing two dielectrics, which can be easily optimized for the desired results. FUSION G03 offers advanced control components that include a multi-level process monitoring machine and mid-chamber at-wafer temperature measurement. This tool is also enabled with a powerful accurate cleaning asset, including a dedicated cleaning chamber and an Environmental Management Model (EMS). This allows the user to control the cleaning process for optimal etch results. AXCELIS G03 also provides advanced chamber geometry to enable reaching high aspect ratios. It also offers a unique rotating wafer holder to ensure highly uniform etching, and a uniform heating option to maintain uniform thermal conditions. Additionally, the software package of this equipment features various modules for process controls, batch sequence management, recipe management, etc. G03 has a number of features that make it an ideal choice for the production of various semiconductor devices. This system is compatible with most common photoresists, and it has a generous gas flow capability, with multiple gas metering configurations, to enable precise adjustment of the etch process. Additionally, the unit offers many safety features, including a secure door interlock machine and multiple safety sensors to ensure a safe working environment. AXCELIS / FUSION G03 is a reliable and efficient etcher/asher tool that works to ensure excellent productivity and excellent results. Its advanced control components, chamber geometry, and unique rotating wafer holder make it a great choice for any semiconductor production environment.