Used AXCELIS / FUSION Gemini GPL #293757340 for sale

AXCELIS / FUSION Gemini GPL is an etching tool used for patterning wafers used in the production of integrated circuits. The equipment has two major components: FUSION Gemini GPL Interface and the Gemini asher. The Gemini asher is a vacuum-etching system with two chambers: a load lock chamber and an etching chamber. The load lock chamber allows the user to move wafers into the etching chamber without exposing the wafer to air. The etching chamber is equipped with a quartz dome on top, a gas inlet port and a pair of gas exhaust ports at the bottom with a vacuum unit that is used to remove etching and deposition by-products. AXCELIS Gemini GPL Interface allows the user to control the etching process and to monitor various parameters. Gemini GPL offers a variety of features to assist in the patterning process. These include high-pressure etching, low- pressure etching, multi-level etch processes, high- resolution patterning and a high degree of process uniformity. The machine can also provide oxygen-plasma etching, which increases etching rate, selectivity and undercut in deep-profile via holes. Additionally, AXCELIS / FUSION Gemini GPL is capable of oxide and polymer removal through a high-speed hydrofluoric acid dip. FUSION Gemini GPL tool is programmed by loading programs into AXCELIS Gemini GPL Interface. These programs are typically written in an etch language compatible with Gemini GPL. Control of the etching process is provided by AXCELIS / FUSION Gemini GPL Interface, which allows users to monitor etching conditions, such as pressure and temperature. The Gemini asher includes protection systems which ensure safety while operating the etch asset. This includes a triple vacuum break model which prevents gases from entering the etching chamber in the event of mechanical failures. Overall, FUSION Gemini GPL is an effective etcher that is well-suited for the production of integrated circuitry. Capable of high-resolution patterning with a variety of features, AXCELIS Gemini GPL is an important tool for circuit etching operations. Additionally, the triple vacuum break equipment ensures that the etching process is a safe one.