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Etchers / Ashers
AXCELIS / FUSION
Gemini GPL
#293757340
Used AXCELIS / FUSION Gemini GPL #293757340 for sale
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Etchers / Ashers
Manufacturer
AXCELIS / FUSION
Model
Gemini GPL
Equipment Details
Reviews
ID:
293757340
Plasma asher Dual ashing chamber Coolplate cassette loading station with automatic robot handler Photoresist etching Gases: O2 / N2H2 Endpoint detection Etch uniformity: < 5%.
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