Used AXCELIS / FUSION Gemini GPS #9272582 for sale

AXCELIS / FUSION Gemini GPS is a state-of-the-art etching/ashing machine, designed specifically for the production of high-precision, high-aspect-ratio microelectronic structures. A significant feature of this tool is its high etch and ashing resolution: demonstrated by its uniform, linear etch rates and a 20-micron structural feature size. FUSION Gemini GPS is ideal for advanced fabrication of wafers with highly complex 3-D structures. AXCELIS GEMINI GPS is equipped with two independent chambers, each featuring a stand-alone 8-axis robot for precise wafer positioning and maneuvering. This ability to multi-axisily move the wafers permits repeatable positioning, allowing for fully automated process runs. Furthermore, the multi-axis motion allows for the use of multiple processing recipes, as well as allowing for advanced techniques such as angled landscape patterning. AXCELIS / FUSION GEMINI GPS is driven by a high-performance processing electronics package. It has variable programmable RF/DC power supply outputs, full motion control of up to 8 axes, and 32 digital inputs and outputs for machine I/O control. All of these features allow for precise process control, translating into higher yield and predictable performance. FUSION GEMINI GPS has several advanced features to improve its process quality. An integrated multi-vision system allows for automated wafer alignment and checking, ensuring accurate process results. In addition, the machine utilizes advanced high-precision RF power control and direct-drive AC valves for on-the-fly gas flow adjustment, providing accurate control of the process environment. In conclusion, GEMINI GPS is a powerful and reliable etch/ash machine, designed specifically for the production of high precision, high aspect ratio microelectronic structures. Its multi-axis motion, variable RF/DC power supply, multi-vision, and precise gas control allow for advanced, high-yield processing. It is an ideal solution for advanced microelectronic fabs.