Used AXCELIS / FUSION Gemini Polo #9398809 for sale

AXCELIS / FUSION Gemini Polo is a compact, high-throughput etch / asher equipment, designed for precision applications in the semiconductor industry. It is equipped with a simple and intuitive user interface, allowing for efficient and easy operation. The system includes an automated, high-precision axis stage, offering superior accuracy and repeatability. FUSION Gemini Polo is ideal for substrate processing, with its advanced etching and ashing capabilities. AXCELIS Gemini Polo has a simple, space-saving design which is perfect for laboratories where space is limited. It includes an onboard secondary electron imaging (SEM) unit for real-time process monitoring and control. The machine also contains an intelligent auto-tune feature that allows it to analyze and tune recipes for optimal results. Gemini Polo has a large web based monitoring tool interface, making it easy to control and monitor processing from an external source. The powerful etch / asher utilizes the HiDef plasma asset, which provides superior uniformity, precision and reproducibility. The large process chamber offers chamber sizes ranging from 250 to 800mm, making it suitable for a wide range of process applications. AXCELIS / FUSION Gemini Polo also uses an automatic pressure control model, ensuring optimal performance and repeatability at all pressure levels. Given its high throughput, accuracy and reliability, FUSION Gemini Polo is an ideal solution for wafer processing applications requiring superior etch / ashing precision. The compatibility of the equipment with robust hardware and advanced software tools offers the flexibility to schedule and execute processes according to specific requirements. The user friendly interface and easy-to-use recipe editor make AXCELIS Gemini Polo an ideal etch / asher for busy laboratories.