Used AXCELIS / FUSION Gemini #293767155 for sale

AXCELIS / FUSION Gemini is an etcher/asher created by FUSION Technologies, Inc., a leading provider of ion implantation and nanofabrication equipment.FUSION Gemini is a critical tool used in the semiconductor industry to etch, clean, or deposit thin layers of material onto integrated circuit chips.AXCELIS Gemini is a two-in-one system featuring both an etcher and an asher, all within the same platform.It is capable of processing high-performance Si fanouts, dopant profiles, and other etch applications. Gemini utilizes CPT2 technology, a patented photo-resist processing architecture from AXCELIS that ensures maximum accuracy, repeatability, and productivity.This technology delivers reliable feature size and repeatability, and eliminates variation found in conventional dry etch systems.AXCELIS / FUSION Gemini also features an innovative dual-chamber design, where the etching and ashing processes are combined in the same chamber, enabling fast, advanced etching without the need to transfer parts to a separate chamber.The environment process chamber allows for the etching and oxidation of semiconductor substrate materials, while an e-deck chamber equipped with powerful e-guns ensures the efficient removal and deposition of material. With FUSION Gemini's rugged mechanical design, advanced wafer handling and an advanced control system, customers can enjoy greater dependability, accuracy, and faster process times than conventional dry etch systems.AXCELIS Gemini also offers improved substrate RON, or N2 performance, enabling higher throughput and accuracy.In addition, Gemini's integrated, real-time predictive algorithm ensures optimal wafer throughput and process optimization.Their advanced process monitoring and control capabilities allow customers to adjust process parameters such as ashing power, gas flow, temperature, and other process settings with absolute precision. AXCELIS / FUSION Gemini's advanced capabilities make it an essential production tool in the semiconductor industry.Whether crafting ultra-fine detail or increased process accuracy, FUSION Gemini's CPT2 technology delivers repeatable, reliable results.Its robust design, efficient wafer handling, and predictive algorithms enable customers to optimize their etching and ashing processes for increased accuracy and throughput.AXCELIS Gemini is a true champion of tailored, precision process control for the modern nanofabrication facility.