Used AXCELIS / FUSION GPS #9226279 for sale

AXCELIS / FUSION GPS is an advanced etch and asher platform that offers superior process control, repeatability and productivity for both process integration and production. It includes a comprehensive suite of software, hardware and consumable products that enable users to create high-precision, highly reproducible processes for a variety of applications. FUSION GPS platform features a powerful control module with a range of software and hardware components, making it suitable for a range of process configurations. The software is designed to be highly flexible and user-friendly, enabling users to quickly and efficiently program and control the system. This system can be used in combination with a variety of etch chemistries and media, making it well suited for integrated processing, production, and contact lithography applications. The hardware components of AXCELIS GPS platform consists of an electron beam source, an optics unit, a wafer stage, and an ion source. The electron beam source generates a high-energy beam which is used to selectively etch features on semiconductor materials. The optics unit enables the proper focusing of the high-energy beam and is equipped with shutter control and other functions designed to optimize the etching process. The wafer stage enables the wafer to be rotated and moved to ensure the uniform processing of all features. Finally, the ion source is used to implant ions into the target substrate, further enhancing the etching process. GPS platform is equipped with a range of safety features designed to protect personnel and facility. These features include a high-resolution Flat Panel Display and advanced safety interlocks, which detects pressure, vacuum and temperature changes that can occur during processing and alerts the operator when an unsafe event occurs. Additionally, the platform includes an integrated cryo-cooling system designed to keep the processing environment cool and clean. Finally, AXCELIS / FUSION GPS platform includes a range of consumable parts and materials to ensure promising results in every application. From consumable masks to sample holders, cables, and more, the platform ensures dependable and consistent performance in each etching and ashing process. Over time, the platform yields superior and repeatable process results.