Used AXCELIS / FUSION / MATRIX Bobcat 209S #9201816 for sale
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ID: 9201816
Wafer Size: 8"
Vintage: 2001
Single chamber asher, 8"
2001 vintage
Power:
208VAC
3 Phase
50 / 60 HZ
Installed in wafer fab
Fully operational
Manuals (CD) available with tool
Asher component details
Mainframe:
Type Standalone
Model Matrix Bobcat 209S asher
Chamber:
How Many? 1
Type RIE
Process ASH
Load locks / Load plate:
Open cassette or SMI Open cassette
How Many? 1
Robot:
How Many? 1
Method of Transport Transfer Unit
Make / Models: Rorze, RR701
RF Generators:
How Many? 2
Make/Models: Comdel FR-111R2, Microwave generator 3kw
Gas box:
Gases used per chamber: 3
Identify gases: N2-1000, N2 -300, N2- 1000 (Gases run O2,N2, none)
MFC’s used (Make /Model): MKS
Control system:
PC or Control Rack? PC
Software ype and Version: Windows nt.
AXCELIS / FUSION / MATRIX Bobcat 209S is an etcher/asher specifically designed for advanced chemical-mechanical planarization (CMP) applications. It utilizes a computer-controlled rotating platen to move the wafer across the process chamber during etching or ashing, providing high throughput and excellent process control. This CMP equipment offers an effective tool for removing material from the wafer surface at a precise rate. FUSION Bobcat 209S provides a high degree of automation for CMP processes. Its features include an advanced process controller, pressure sensors in both the substrates and the fluid delivery system to adjust the slurry supply, exhaust pressures, temperature and pressure control for each process step and automated process flush and wafer cleaning cycles. MATRIX Bobcat 209S is also equipped with a VDIL (vision-directed inert etching) feature that allows it to process multiple lot sizes without operator intervention. The unit also allows for precise process control with optional DPM (diffractive feedback) sensors. Additionally, AXCELIS Bobcat 209S provides a variety of process support tools such as temperature and pressure profiles, wafer cleaning profiles, and process recipes. To ensure enhanced process repeatability and reliability, Bobcat 209S employs software compatible with recipe management software systems. AXCELIS / FUSION / MATRIX Bobcat 209S is a flexible CMP machine; therefore, it supports a variety of CMP processes, including etch-back, chemical mechanical polishing (CMP), gas and chemical etching, and ashing. It is capable of accommodating wafers up to 200 mm in diameter. In terms of safety, FUSION Bobcat 209S conforms to the CE and CSA safety standards. As a result of its reliable design and safety standards, MATRIX Bobcat 209S offers maximum throughput and efficient VDIL performance. Furthermore, its cost-efficiency, easy maintenance and wide range of process options make it an ideal choice for advanced semiconductor fabrication and CMP applications.
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