Used AXCELIS / FUSION / MATRIX Bobcat #9278672 for sale

AXCELIS / FUSION / MATRIX Bobcat is a high-performance, advanced-technology etcher and asher that is capable of producing high-precision, complex 3-dimensional features in a variety of different substrates. FUSION Bobcat utilizes a combination of advanced ICP-RIE (inductively coupled plasma-reactive ion etching) and O3-SE (ozone-supported etching) etching processes to achieve precise, high-resolution pattern definition in substrates such as chip, metal, and composite materials. MATRIX Bobcat etching system consists of three independent chambers, each with its own set of functions. The first chamber is the coating robot, which is responsible for automatically interfacing the wafer to the appropriate coatings. The second chamber is the asher, which uses deep ultraviolet (UV) light to precisely expose the target material. The third chamber is the etcher, which utilizes ICP-RIE or O3-SE etching processes to precisely etch pattern the material. Each of the three Bobcat chambers are equipped with a wide array of adjustable parameters, allowing for precise control of AXCELIS Bobcat's etching and ashing processes. These parameters range from the power level of the microwave source, the flow rate of the etching/ashing gasses, the gas composition, the etching/ashing duration, the voltage applied to the electrodes, and the platen temperature. Each parameter can be adjusted independently to achieve the highest degree of precision and quality for each and every etch job. AXCELIS / FUSION / MATRIX Bobcat is also equipped with an advanced data handling system that allows users to program and monitor all of their etching and ashing processes. The software allows users to store and compare etching results, modify parameters, and make on-the-fly changes as needed. This system ensures that the entire etching process is conducted in a repeatable and controlled manner. Overall, FUSION Bobcat is one of the most advanced etchers and ashers on the market today, with a range of adjustable features that make it ideal for etching and ashing with high precision and quality. MATRIX Bobcat is perfect for the manufacturing of advanced electronic components and substrates, or for the creation of complex 3-dimensional structures for specialized applications.