Used AXCELIS / FUSION MU #293767225 for sale

AXCELIS / FUSION MU is an etcher/asher designed for advanced semiconductor processing applications. It is a multi-chamber production equipment that is capable of handling a wide variety of wafer sizes and substrate materials. The system is designed to provide uniform results with low cost-of-ownership. FUSION MU has a semiconductor processing chamber and a semiconductor etch chamber. The processing chamber is equipped with a wafer support, gas panels, thermal zones, and an RF generator. The temperature zones ensure that the process temperatures within the chamber stay uniform over the entire wafer. The RF generator provides precise and repeatable etching. The etch chamber is designed for chemical vapor deposition (CVD) and ion implantation. It has a numerous number of ion beam sources, high and low pressure bridges, and a full set of safety systems that will prevent material damage. AXCELIS MU is equipped with a particle management unit that operates by a dust extraction machine that removes particulate from all columns. The particle management tool ensures uniform etching results. MU is capable of etching at sizes of up to 8 inches. The asset can process up to 2000 wafers per night with a cycle time of 350 seconds. The model can work in a variety of gas types, including SF6, Cl2, H2, and N2. The equipment also offers advanced features such as computer-controlled etching, which helps enhance yield and reduce processing time. AXCELIS / FUSION MU has the ability to monitor process parameters in real-time, providing greater consistency and uniformity. It provides the ability to analyze and store data on an on-board memory system. The unit also offers a wide range of process recipes for a variety of applications. Overall, FUSION MU is a reliable and advanced etcher/asher that provides high yields and production efficiencies. It is designed to ensure uniform etching results with high repeatability. It is a great choice for advanced semiconductor processing applications and offers features that will enhance productivity and profitability.