Used AXCELIS / FUSION RadiantStrip 320 #293822275 for sale

AXCELIS / FUSION RadiantStrip 320 is a dedicated etch and ashing equipment designed for advanced nanofabrication process. It is a high-precision system developed for thin film etching of wafers and substrates. The unit is capable of providing clean, controlled etching that is crucial for today's high-precision nanofabrication processes. FUSION RadiantStrip 320 is a process chamber that offers a unique design that minimizes plasma loading. It is designed to achieve low chamber pressures at high etch rates. The chamber's configuration allows for the optimization of multiple process parameters and can reliably deliver high-quality etching results. The machine uses a high purity, high-pressure inert gas as the plasma-forming gas and a low-pressure RF generator to create plasma in the chamber. The plasma is then used to etch the substrate. The tool also provides a low voltage and energy consumption. Additionally, AXCELIS RadiantStrip 320 can provide processes with good repeatability and excellent uniformity. The asset provides users with various process recipes, for example, rapid thermal annealing, polyimide etching, silicon nitride etching, and etching of metallic thin films. Each recipe can be configured with parameters such as temperature, pressure, power, and flow rates. It also supports non-standard process recipes, which allows users to customize processes for specific applications. RadiantStrip 320 also offers robust safety features. It is equipped with a dual chamber vacuum-based interlocking model that ensures a safe working environment. The equipment also contains an ESD-protection circuit that prevents ESD surges from impacting the etching process. Overall, AXCELIS / FUSION RadiantStrip 320 is an advanced etch and ashing system that is capable of providing clean and precise etching and ashing with repeatable and uniform results. The unit provides users with a wide portfolio of applications and customizable recipes as well as versatile safety features that protect workers from ESD surges. It is ideal for high-precision nanofabrication processes.