Used AXCELIS / FUSION RadiantStrip 320ES #293625715 for sale

ID: 293625715
Stripper / Asher.
AXCELIS / FUSION RadiantStrip 320ES is an hpa etch/ash equipment specifically designed for advanced patterning applications. This system, with its advanced technology, is able to handle wafer sizes from 200mm to 300mm. It features two independent, high performance end station process cells and two independent load locking modules to reduce the learning curve and minimize misunderstandings. FUSION RadiantStrip 320ES offers both high productivity and feature height uniformity. It has an updated user interface which provides excellent control, detailed process escalation capability, and intuitive visibility of the unit's operating temperature and events. Additionally, AXCELIS RadiantStrip 320ES supports an array of advanced processes, including deep reactive ion etching, nanopatterning, and chemical mechanical polishing. RadiantStrip 320ES machine also includes an advanced turbomolecular pump that is regulated to ensure a constant chamber pressure environment, a good reduction in process-induced CD variation for photomask densities, and a decrease in feature loss for high aspect ratios. Its integrated remote plasma source provides excellent uniformity with a very low frequency and is designed to minimize process degredation from high power plasma sources found in other etch systems. It also features advanced single-wafer cooling to optimize thermal budget and reduce defects. AXCELIS / FUSION RadiantStrip 320ES also has advanced upgradeability, allowing the tool to be customized to accommodate the customer's needs. It features a range of options, such as additional end station cells, short etc/ash tools, narrow gap tools, and additional process modules. FUSION RadiantStrip 320ES is ideal for a number of advanced patterning applications, including advanced memory and device development, as well as thin-film transistor fabrication. Designed with the highest quality materials, AXCELIS RadiantStrip 320ES is a reliable asset that delivers excellent results while offering process continuity and high productivity. With its advanced process technology and flexibility in allowing customers to customize their systems, RadiantStrip 320ES is an excellent choice for anyone who needs an efficient and reliable etch/ash model for their production needs.
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