Used AXCELIS / FUSION Rapidstrip 210 #293632717 for sale
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ID: 293632717
Wafer Size: 8"
Vintage: 2006
Stripper / Asher system, 8"
Chiller
Vacuum pump
Cavity
2006 vintage.
AXCELIS / FUSION Rapidstrip 210 is a highly advanced etcher/asher designed for high speed, precise etching and ashing tasks. The equipment utilizes a combination of reactive-ion etching (RIE), chemical vapor deposition (CVD) and wet processes. FUSION Rapidstrip 210 has two built-in etching chambers, one for the reactive-ion etching process, and the other for chemical vapor deposition processes. The two systems are optimized for different etching and ashing requirements. The device is capable of etching surfaces down to 0.2 μm resolution, allowing for very precise results. It operates at a working pressure as low as 0.1 mbar and can be configured to handle advanced materials such as silicon, III-V materials, and organics. Additionally, AXCELIS Rapidstrip 210 can achieve very high throughput thanks to its advanced auto-loading capabilities. The in-line wafer cassette loader allows for time saving when loading and unloading materials, while the automated process control system simplifies operations and reduces the risk of human error. The unit is also equipped with a variety of safety features, ensuring the machine runs safely and efficiently. It has integrated safety controllers for monitoring gas flow and chamber pressures, as well as EMI filters for protection against electric or magnetic interference. It also has reverse-polarity protection against voltage errors and emergency program stop when the machine encounters errors. To further enhance its operation, Rapidstrip 210 is designed to be user friendly. Its intuitive graphical user interface (GUI) provides easy navigation through a variety of tasks. Moreover, users can select specific recipes, store and access frequently used recipes and review past processes, supporting them in setting it up for the desired etching or ashing processes. Overall, AXCELIS / FUSION Rapidstrip 210 etcher/asher is an advanced tool designed for high speed, precise etching and ashing tasks. With its user friendly GUI, a variety of integrated safety features, high precision, and high throughput capabilities, it is well suited for a wide range of etching and ashing requirements.
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