Used AXCELIS / FUSION RapidStrip 320 #9298289 for sale

AXCELIS / FUSION RapidStrip 320 is an advanced etcher/asher tool engineered for high selectivity, variable temperature and pressure, and rapid process rates. It is capable of processing a variety of substrates, such as Silicon, compound systems, and GaAs. This tool offers a broad range of high-vacuum etch rates, including shallow etches (<10nm), sub-micron, and deep etches (<20 µm). Its precision process control enables the user to achieve highly repeatable etch profiles. The tool utilizes a unique process chamber geometry to achieve multi-phase processing capabilities. This allows for simultaneous etching of multiple substrates and the uniform development of complex process profiles. The chamber also offers low magnetic fields throughout processing thereby allowing for a cleaner and more reliable process. FUSION RapidStrip 320 features independent process chambers (both front and back) with variable temperatures and pressure settings, giving the user complete control over the etching process. This tool also has a deposition port for thickness monitoring or deposition of a sacrificial material. The chamber also provides full connectivity to other AXCELISelements such as remote monitors, real-time process data logging, and process recipes for repeatable and reliable etch processes. AXCELIS RapidStrip 320's fast lithography capability allows for fast and accurate printing of patterns with throughput of up to 4 wafers per minute and a resolution down to 10nm. It also provides an advanced etch process integration with process control via real-time monitoring and full wafer level process recipes for precise control of process end-points and repeatability. RapidStrip 320 is an exemplary piece of equipment that delivers user-friendly operation with the latest process control and monitoring technology, enabling repeatable and robust etching processes. This combination of features makes it one of the most powerful and advanced etchers/ashers on the market.