Used AXCELIS / FUSION Rapidstrip #293632719 for sale

AXCELIS / FUSION Rapidstrip is an etcher and asher specifically designed for a variety of semiconductor applications. It is designed to provide industry-leading etch rates and superior surface planarity, at a competitive price point. This equipment is built to process both 200 and 300mm wafers, with the utmost of accuracy and precision. The etching/ashing chamber is built for true parallel-plate etching capabilities, allowing for enhanced flexibility and process control. The chamber is driven by a high-pressure turbomolecular pump capable of operating with an exceptional base pressure of 5× 10-7 Pa and pumping speed up to 20 liters/second. The process gas valve design incorporates six independently combined gas outputs, while boasting a maximum gas flow of 85 Standard liters/minute. In terms of process control, FUSION Rapidstrip features an adjustable power control range of 0-550W with a maximum etch rate of 5A/min, plus recipes files are able to store up to 32K factors into memory. The uniformity profile across the wafer is flat within 3% deviation, with a total thickness uniformity of 4-7%. The materials plate, focus ring, and igniter are all constructed from stainless steel, making the etcher and asher highly durable and reliable. The equipment also has a built-in cooling/cleaning system for optimum performance, with a nitrogen/oxygen capability for environmental protection. AXCELIS Rapidstrip is compatible with a wide range of organic, inorganic, and metal-containing materials, various substrates, and a variety of sizes. It also allows for the etching of the deepest trenches and the most minuscule vias, and meets the highest standards of quality accepted in the semiconductor industry. In summary, Rapidstrip is an extremely powerful and reliable etcher and asher, capable of meeting the most complex requirements of semiconductor customers.